Soft X-ray Diffraction Plate

这项研究将评估一种新的软X射线光学（a 软X射线衍射板，SXDP），其类似于 可见光中的扩散器。 因为它可以消除冷凝器 光学和增加光子通量，它将是一个有用的光学 只要光学常数使折射和反射 光学元件困难。 第一个应用程序， II，将改善成像软X射线显微镜（ISXM）， 使得这种显微镜更加坚固并且在商业上可行 仪器. 我们预计将开发更多的应用程序 在照明均匀性和保护 通量是至关重要的。 非均匀源的X射线光谱学 而投影软X射线光刻技术将是第一批 从中获益 SXDP由一层不透明的薄膜组成， 小洞，其大小相当于波长的 X光片 这种新型的X射线光学器件可以提高通过ISXM的通量 并提供良好的数值孔径 匹配. 这个镜头将有助于广告 开发紧凑型ISXM。 在第一阶段，SXDP模型，使用分析和计算机 技术，将决定哪种制造方法将 生产最佳的SXDP，并通过以下方式评估其性能： 将数据与理论进行比较。

This research will evaluate a new soft X-ray optic (a Soft X-ray Diffraction Plate, SXDP) which is analogous to a diffuser in the visible. Because it can eliminate condenser optics and increase photon flux, it will be a useful optic wherever optical constants make refractive and reflective optical elements difficult. The first application, in Phase II, will be to improve imaging soft X-ray microscopy (ISXM), making such microscopes more robust and commercially viable instruments. We anticipate further applications will develop in areas where uniformity of illumination and preservation of flux are crucial. X-ray spectroscopy of inhomogeneous sources and projection soft X-ray lithography will be among the first to benefit. The SXDP consists of an opaque film with a multitude of small holes, whose size is comparable to the wavelength of the X-rays. This novel X-ray optic may improve flux through ISXMs by an order of magnitude and provide good numerical aperture matching. This optic will contribute to the commercial development of a compact ISXM. In Phase I, SXDP models, using analytical and computer techniques, will decide which manufacturing method will produce optimum SXDPs and evaluate their performance by comparing data with theory.