Engineering Research Equipment: Electronics and Software for Nanoelectromechanical STM

康奈尔大学电气工程学院将购买扫描隧道显微镜设备和软件，这些设备和软件将专门用于支持工程研究。这些设备将用于几个研究项目，特别包括：美国国家科学基金会资助的项目“微动力学和纳米动力学：材料结构和器件：半导体研究公司项目，电子束曝光用大规模并行电子束结构以及DARPA赞助的射频真空微电子项目(与雷神公司合作)。所有这些项目都使用直径20 nm的硅尖或硅尖阵列来生产隧道显微镜设备，或生产用于电子束仪器或真空微电子设备的场发射器阵列。我们设计了一种独特的纳米机电仪器：一种高速(5 MHz)扫描隧道设备，用于制造独特的传感器来检测声音、辐射、质量、压力和加速度。本建议书中要求的扫描隧道显微镜(STM)设备和软件将用于驱动我们的纳米机电隧道设备，并表征加工的针尖形成硅场和隧道尖端结构。

The School of Electrical Engineering at Cornell University will purchase Scanning Tunneling Microscope equipment and software which will be dedicated to support research in engineering. The equipment will be used for several research projects, including in particular: the NSF sponsored project "Microdynamics and Nanodynamics: Materials Structure and Devices: the Semiconductor Research Corporation project, "Massively Parallel Electron Beam Architecture for Electron Beam Lithography; and a DARPA sponsored project (with Raytheon) on RF Vacuum Microelectronics. All these projects use 20 nm diameter silicon tips or arrays of silicon tips to produce tunneling microscope devices or to produce field emitter arrays for electron beam instrumentation, or vacuum microelectronic devices. We have designed a unique nanoelectromechanical instrument: a high-speed (5 MHz) scanning tunneling device to be used to make unique sensors to detect sound, radiation, mass, pressure, and acceleration. The Scanning Tunneling Microscope (STM) equipment and software requested in this proposal will be used to drive our nanoelectromechanical tunneling devices and to characterize the tip formation processed for both silicon field and tunneling tip structures.