Substitution of Liquid Carbon Dioxide for Chlorofluorocarbon

利用动量传递的概念去除亚微米级的杂质 通过以高速供应溶剂液滴来制备微粒。 特别是，液态二氧化碳取代了以前的 使用溶剂（CFC），以实现增强的超净， 成本高于其他替代技术，同时消除CFC 根据《蒙特利尔议定书》的规定， 实验工作不同的操作条件下，使用镜面反射 作为测试对象的表面和记录的光学方法 结果将用于优化程序和比较 替代技术的结果。 现有，商业 核心技术的实施方案将被改造， 在工业中使用调查结果。

The concept of momentum transfer is used for removal of submicron particulates by supplying droplets of solvent at high velocity. In particular, liquid carbon dioxide is substituted for formerly used solvents (CFCs) to achieve enhanced ultracleaning lower costs than in other substitute technologies, while removing CFCs from use, as required by the terms of the Montreal Protocol. Experimental work varying conditions of operation, using specular surfaces as test objects and optical methods of documenting results will be used to optimize the procedure and compare results with alternative technologies. Existing, commercial embodiments of the core technology will be retrofitted for early use of findings in industry.