NSF-CGP Science Fellowship Program: Synthesis and Charact- erization of Ferroelectric Thin Films

在为期两年的研究访问期间，Cross博士将与Fujitsu Corporation无机材料和聚合物实验室Nobuo Kamehara进行合作项目，以制备和评估新型铁电材料的电性能。他们的研究将侧重于在不同的衬底上制备各种铁电材料的薄膜，并开发铁电材料性质的经验模型。由于铁电材料具有优异的导电性，电子制造商正在研究铁电材料，希望利用它们进一步缩小半导体器件的尺寸。虽然铁电材料在其块状晶体形式中表现出优异的性能，但在薄膜中再现其块状性能是非常困难的。无论采用何种技术，在整个薄膜中产生均匀的化学成分都是困难的。Cross和Kamehara将使用广泛的定量和定性变量设计薄膜样品矩阵：化学成分，电极，溅射靶，压力，温度，功率密度等。在不同的铁电材料沉积在不同的基板上后，该团队将测量材料的电学特性，并将该数据作为开发经验模型的基础。然后，该团队计划在压电材料上测试他们的经验模型，并最终使用他们的模型来设计未来的半导体器件。＊＊＊

9403606 Cross During a two-year research visit, Dr. Cross will pursue a cooperative project with Nobuo Kamehara, Inorganic Materials and Polymers Laboratory, Fujitsu Corporation, to prepare and evaluate the electrical properties of new ferroelectric materials. Their research will focus on producing thin films of various ferroelectric materials on different substrates and developing empirical models of the ferroelectric material properties. Because of their superior conductive properties, ferroelectric materials are being studied by electronic manufacturers with the hopes of using them to further reduce the size of semiconductor devices. Although ferroelectric materials exhibit excellent properties in their bulk crystalline form, reproducing the bulk properties in thin films has been extremely difficult. Regardless of the technique, producing a homogeneous chemical composition throughout the film is difficult. Cross and Kamehara will design a matrix of thin film samples using a wide range of quantitative and qualitative variables: chemical composition, electrodes, sputtering targets, pressure, temperature, power density, etc. After different ferroelectric materials are deposited on various substrates, the team will measure the electrical properties of the materials and use that data as a basis for developing empirical models. The team then plans to test their empirical models on piezoelectric materials and finally to use their models to design future semiconductor devices. ***