Interferometer Instrumentation for Characterization of Micro-mechanical Structures

9504099肯尼，托马斯 该项目涉及微机械结构和器件的设计、制造和表征。 重点是对制造的微机械结构的表征。 机械性能的精确非接触式测量也非常重要。 该仪器将用于支持多个实验，包括隧道传感器的表征、微机械传感器部件中的模态研究以及机械微结构的基本表征，重点是特性随环境参数（例如压力或温度）的演变。 这种基于干涉仪的测量系统正在成为工业中微机械结构表征的标准，并代表了学术界的独特资源。 它将为微观结构表征提供一种全新的能力，并使研究生能够使用毕业后在工业中可能遇到的设备进行测量。 这种仪器代表了斯坦福大学器件测试能力的宝贵提高，也是对微机械结构的基本特性进行突破性研究的机会。

9504099 Kenny, Thomas This project is concerned with the design, fabrication, and characterization of micromechanical structures and devices. Emphasis is on the characterization of the fabricated micromechanical structures. Accurate non-contact measurements of mechanical properties are also very important. This instrumentation will be used in support of several experiments, including characterization of tunneling sensors, study of mode shapes in micromachined sensor components, and fundamental characterization of mechanical microstructures, with emphasis on evolution of characteristics with environmental parameters, such as pressure or temperature. This interferometer-based measurement system is on its way to becoming a standard for micromechanical structure characterization in industry, and represents a unique resource in the academic community. It will provide a fundamentally new capability for microstructure characterization, and enable graduate students to carry out measurements using equipment which they can expect to encounter in industry after graduation. This instrumentation represents an invaluable enhancement in the device testing capabilities at Stanford as uell as an opportunity to carry out ground-breaking research into the fundamental properties of micromechanical structures.