Electromigration Strain Gradients

9530043嘉吉这项用于探索性研究的小额赠款支持对钝化多晶铝-5%铜导线中与电迁移相关的应变和成分梯度的研究。其目的是将一种新的实验方法应用于电迁移这一长期存在的问题，以便更好地理解和检验关于电迁移过程中多晶金属化结构中应变和成分分布的起源、控制和后果的理论。该程序将毛细光学与X射线衍射仪和能量色散X射线检测相结合。这项工作中的挑战之一是在具有足够的入射X射线通量以在实际时间段内进行精确的衍射测量的同时，在显微衍射测量中获得必要的空间分辨率。%本研究提供了上述方法的演示，并应允许首次直接、空间分辨地测量钝化导线中电迁移过程中的应变梯度。它应该促进对工业设计的科学认识和实践。***

9530043 Cargill This small grant for exploratory research (SGER) supports a study of strain and composition gradients associated with electromigration in passivated polycrystalline aluminum - 5% copper conductor lines. The objective is to apply a new experimental approach to the long standing problem of electromigration in order to improve understanding and test theories concerning the origins, control, and consequences of strain and composition distributions in polycrystalline metallization structures undergoing electromigration. The program integrates capillary optics with X-ray diffraction apparatus and energy dispersive X-ray detection. One of the challenges in the work is to achieve the necessary spatial resolution in microdiffraction measurements while having sufficient incident X-ray flux to make accurate diffraction measurements in a practical time period. %%% This research provides a demonstration of the approach described above, and should permit the first direct , spatially resolved measurements of strain gradients during electromigration in passivated conductor lines. It should advance scientific understanding and industrial design practice. ***