Development and Integration of Quiet Hydraulic Components for Precision Machines

机床和计量仪器的热控制和温度梯度是精密工程的基本限制。最小化这些限制的一种方法是使用液压驱动和传感，因为它具有高效的能量传递。这种方法也适用于油淋，这是在超精密制造中实现热控制的方法之一。该项目将开发一种基于层流电机和直线执行器的超精密机床，以及用于直线度和偏航补偿的油差动表。这些部件是由斯坦福大学开发的，部分得到了美国国家科学基金会战略制造计划的支持，以消除液压执行器的节流控制，从而导致湍流、噪音和振动。主要的研究工作将是开发兼容的液压传感器和集成的相当执行器在一个超精密，安静的液压金刚石车床。本研究主要对精密工程和超精密机床的基础设施产生影响。与现有的超精密机器和设备相比，它有望以更低的成本实现更好的热控制。

9532041 DeBra Thermal control and temperature gradients in machine tools and metrology instruments are fundamental limitations to precision engineering. A way to minimize these limitations is using hydraulic actuation and sensing, because of its high and efficient transfer of energy. This approach is also compatible with oil showering, one of the ways thermal control is achieved in ultra-precision manufacturing. This project will develop an ultra precision machine tool based on laminar flow motors and linear actuators, and oil differential gages for straightness and yaw compensation. These components were developed at Stanford University, in part with NSF Strategic Manufacturing Initiative support, to eliminated control of hydraulic actuators by throttling which leads to turbulence, noise and vibration. The major research efforts will be on development of compatible hydraulic sensors and integration of the quite actuators in an ultra precision, quiet hydraulic diamond turning machine. The impact of this research is primarily on the infrastructure for precision engineering and ultra precision machine tools. It promises better thermal control at lower cost than is possible with existing ultra precision machines and equipment.