SBIR Phase II: Ion Implanted Thin-Film Zinc Gallate Phosphors for Field Emission Displays

斯皮尔公司Ward Halverson这个小型企业创新研究(SBIR)二期项目将开发没食子酸锌(ZnGa2O4)作为薄膜荧光粉，并通过对发光中心进行选择性离子注入来生产全色面板。基于阴极发光材料的场发射显示器(FED)是有源矩阵液晶显示器的一种很有前途的替代品，然而，传统的硫化物粉末荧光粉由于其颗粒性、电流饱和特性和有限的工作寿命而影响FED的性能。用无硫薄膜氧化物材料取代粉末荧光粉可以提高色度，实现更精细的清晰度，延长荧光粉的使用寿命，同时降低制造成本。在溅射沉积的ZnGa2O4中注入了Eu和Mn2+，I相显示出明亮的红色和绿色的阴极发光(CL)，而在“自激活”(富Ga)的没食子酸锌薄膜中发现了明亮的蓝色CL。第二阶段将优化荧光粉的制备、离子注入和退火，并通过最小化薄膜荧光粉中的导光来提高外部发光效率。将有机金属化学气相沉积与溅射沉积薄膜荧光粉进行比较。将对更广泛的活化剂和助活剂离子以及退火表进行研究。多色荧光粉面板将被制造出来，并在运行的FED设备中进行演示。平板、场发射显示器具有高亮度、宽色域、高电效率和长使用寿命，将在计算机终端、膝上型计算机、仪表板、导航辅助设备以及从蜂窝电话到电视机的消费电子产品中得到应用。

Spire Corporation Ward Halverson This Small Business Innovation Research (SBIR) Phase II project will develop zinc gallate (ZnGa2O4) as a thin-film phosphor and produce full color faceplates by selective ion implantation of luminescence centers. Field emission displays (FEDs) based on cathodoluminescent phosphors are promising alternatives to active matrix liquid crystal displays; however, conventional sulfide-based powder phosphors compromise FED performance due to their granular nature, current-saturation characteristics, and limited operating lifetime. Replacing powdered phosphors with sulfur-free, thin film oxide materials can improve chromaticity, allow much finer definition, and increase phosphor lifetime, while reducing manufacturing costs. Phase I demonstrated bright red and green cathodoluminescence (CL) in sputter-deposited ZnGa2O4 which was ion implanted with europium and manganese; and bright blue CL was found from "self-activated" (Ga-rich) zinc gallate films. Phase II will optimize phosphor preparation, ion implantation and annealing, and increase external luminous efficiency by minimizing light-guiding in the thin-film phosphor. Organometallic chemical vapor deposition of ZnGa2O4 will be compared to sputter-deposition of the thin film phosphor host. A wider range of activator and co-activator ions and annealing schedules will be investigated. Multi-colmr phosphor faceplates will be fabricated and demonstrated in an operating FED device. Flat, field emission displays with high luminance, wide color gamut, high electrical efficiency, and long operating life will find applications in computer terminals, lap-top computers, instrument panels, navigational aids, and consumer electronics from cellular telephones to television sets.