Engineering Research Equipment: Microelectronic Fabrication Facility

9622370安德森电气和计算机工程、化学工程和物理系将购买设备，进行需要微电子制造的工程研究。该设备将用于几个研究项目，特别包括：用于光电探测器和场效应晶体管的金属-半导体接触；电光效应；双电致滤光器；以及半导体中的远红外效应。该设备将极大地提高我们在微电子制造方面的综合能力，为许多教职员工、许多学生、当地工业界和教学人员所使用。主要的重点是为各种应用实现可重复的1-2um图案化。作为对该提议的补充，该大学将提供独家资金，用于扩建洁净室以容纳新设备。该大学提供1/3的设备费用分摊。精通电力、管道、空调和电子设备的大学人员将协助安装新设备和随后的维护。新设备还将支持我们电子和电光材料中心(CEEM)的15名教职员工。该中心代表5个部门，包括40多名研究生，其中一些人将使用新设备。***

9622370 Anderson The Department of Electrical and Computer Engineering, Chemical Engineering, and Physics will purchase equipment to conduct research in engineering requiring microelectronic fabrication. The equipment will be used for several research projects including in particular: metal-semiconductor contacts for photodetectors and field effect transistors; electro-optic effects; dielectrophorectic filters; and far infrared effects in semiconductors. The equipment will greatly improve our overall capability in microelectronic fabrication which is utilized by many faculty, many students, local industry and in teaching. The primary focus is to achieve repeatable 1-2 um patterning for a variety of applications. To complement the proposal, the University will provide sole funding in expanding the Clean Room to house the new equipment. The University provides 1/3 cost sharing for the equipment. University personnel, skilled in electrical work, plumbing, air conditioning and electronics will assist in setting up the new equipment and in subsequent maintenance. The new equipment will also support the 15 faculty from our Center for Electronic and Electro-optic Materials (CEEM). This Center represents 5 departments and includes over 40 graduate students, some of whom will use the new equipment. ***