CAREER: MEMS for the Masses

提出了一种实现微电子机械系统(MEMS)和器件设计与制造解耦的方法。将开发一种设计基础设施，使非专家能够快速设计和模拟MEMS器件和系统。其理念遵循VLSI范例，其中晶片制造和创建要实现的图案的设计工作之间存在明显的分离。MEMS软件工具、设备模型和教育材料将在互联网上提供。这些工具将包括原理图编辑、布局综合、参数提取和仿真。该提案还包含一项强有力的教育计划，扩大了国际学生联合会在招收本科生方面的成功，包括女性和代表性不足的少数族裔，成为研究生院的学生。

A method is proposed for the decoupling of design and manufacturing of micro- electromechanical systems (MEMS) and devices. A design infrastructure is to be developed that will allow non-experts to quickly design and simulate MEMS devices and systems. The philosophy follows the VLSI paradigm, where there is a clear separation between the wafer fabrication and the design effort that creates the pattern which is to be implemented. MEMS software tools, device models, and educational materials will be made available on the Internet. These tools will include schematic editing, layout synthesis, parameter extraction and simulation. The proposal also contains a strong education plan extending the PI's successes in recruiting undergraduates, including women and under-represented minorities, to become research students.