Physics and Simulation of Helicon Plasma Sources

项目编号：ECS-9632377项目负责人：John Scharer/University of Wisconsin题目：Helicon等离子体源的物理与模拟摘要本研究将提供一个协调的关于Helicon等离子体源的理论、计算和实验研究项目。这些高密度高效光源对各种应用都很有兴趣：半导体的中性束亚微米蚀刻，大型平板显示器的加工，材料表面改性，用作空间模拟和基本等离子体源和波传播研究的大体积等离子体源。尽管人们对这些源有浓厚的兴趣，但很少有详细的模拟来更好地模拟和理解螺旋源。拟议的研究非常全面，将涉及几个要点。其中包括：将描述传输时间阻尼和朗道过程的非对角线热等离子体介电张量项合并到ANTENA2代码中（由Scharer教授开发），该代码用于描述不同螺旋天线线圈配置和径向等离子体剖面的三维波场和径向碰撞和无碰撞功率吸收。此外，ANTENA2代码将与INDUCT95传输代码接口，以检查自一致的等离子体剖面演变以及在实验中观察到的体电子和快电子可能的不同作用。从独立的协作中免费获得INDUCT95代码是所建议的工作的主要收获。独立合作者希望有机会与ANTENA2代码一起开发INDUCT95传输代码。此外，作为对社区的一项服务，在拨款来源期间，ANTENA2代码将普遍提供给其他研究人员，以回答对代码的大量请求。

Proposal Number: ECS-9632377 Principal Investigator: John Scharer/University of Wisconsin Title: Physics and Simulation of Helicon Plasma Sources Abstract This research will provide a coordinated theoretical, computational and experimental research program on helicon plasma sources. These high density efficient sources are of interest for a variety of applications: neutral beam sub-micron etching of semiconductors, processing of large flat panel display, materials surface modification, use as a large volume plasma source for space simulations and for basic plasma source and wave propagation studies. Despite strong interest in these source few detailed simulations have been carried out to better model and understand helicon sources. The proposed study is very through and will address several important points. Among these are: incorporation of off diagonal hot plasmas dielectric tensor terms which describe transit time damping as well as Landau process, into the ANTENA2 code (developed by Professor Scharer) which is used to describe 3-D wave fields and radial collisional and collisionless power absorption for different helicon antenna coil configurations and radial plasma profiles. Also the ANTENA2 code will be interfaced to the INDUCT95 transport code to examine the self-consistent plasma profile evolution and the possibly differing roles of bulk and fast electrons as observed in experiments. The availability of the INDUCT95 code free of charge from an independent collaboration is a major gain to the proposed effort. The independent collaborators wants the opportunity to develop the INDUCT95 transport code in tandem with the ANTENA2 code. Also, as a service to the community, the ANTENA2 code will be made generally available to other researchers during the source of the grant to answer substantial requests for the code.