Industry/University Cooperative Research Center for Microcontamination Control

O'HANLON微污染控制中心研究与清洁有关的问题，表面颗粒检测，气体和水管道中使用的过滤器的特性，超纯水中细菌的测量，以及与超净制造设备和环境中的污染有关的一些问题。该奖项为亚利桑那大学工业/大学微污染控制合作研究中心的最后两年提供资金。中心继续满足I/UCRC项目的更新标准要求。

ABSTRACT EEC-9633793 O'HANLON The Center for Microcontamination Control studies issues related to cleaning, particle detection on surfaces, characterization of filters used in gas and water lines, measurement of bacteria in ultrapure water, and a number of problems related to contamination in ultraclean manufacturing equipment and environment. This award provides funding for the last two years of the University of Arizona's Industry/University Cooperative Research Center for Microcontamination Control. The Center continues to meet the renewal criteria requirements of the I/UCRC Program.