SBIR Phase II: Low Cost and Ultra-High Precision Position Sensing System for Microelectrics Manufacturing

** 9710602 Ohara本小企业创新研究二期项目旨在开发高精度位置测量系统。这些系统用于测量和控制制造设备的高精度运动。该系统利用扫描探针显微镜（SPM）技术、微机电系统（或微机械）和高精度全息光栅以及同步信号检测。该设备结构简单，易于使用，为最终用户节省了大量成本。第一期项目的重点是研究基于所提出的方法提供可靠和高速的位置测量系统的方法。在第二阶段，第一阶段的结果将进一步发展为产品级原型。新的原型设计旨在展示优于0.1nm的分辨率，并在2英寸范围内检测速度超过10mm/秒的运动，同时提高可靠性和稳定性。机械和控制器设计的优化程序将与原型开发一起开发和测试，期望对整体开发时间和成本节省做出重大贡献。全球对超精密位置测量和控制系统的需求在以下关键行业迅速增长：1)半导体制造设备；2)用于硬盘写入的伺服写入器；3)光盘母带设备；4)非球面透镜和反射镜的高精度加工。* * *

*** 9710602 Ohara This Small Business Innovation Research Phase II Project is for the development of a high precision position measurement system. Such systems are used to measure and control the highly-precise motion of manufacturing equipment. The system utilizes Scanning Probe Microscope (SPM) technology, MEMS (or micro machines), and a high precision holographic grating together with synchronous signal detection. The simple structure of the device and ease of the use suggest significant cost savings to the end user. The focus of the Phase I project has been to investigate the means of providing a reliable and high speed position measurement system based on the proposed method. During Phase II, Phase I results will be further developed toward a product level prototyping. The new prototype design will aim to demonstrate better than 0.1nm resolution and to detect faster than 10mm/sec motion over 2" range with increased reliability and stability. An optimization procedure for mechanical and controller design will be developed and tested along with prototype development, with the expectation of significant contribution to overall development time and cost savings. The demand for ultra-precision position measurement and control systems worldwide has grown rapidly in such key industries as 1) semiconductor manufacturing equipment; 2) servo-writers for hard disk writing; 3) optical disk mastering equipment, and 4) high-precision machining of aspheric lenses and mirrors. ***