POWRE: Microstructural, Optical and Electrical Properties of Thin Film Silica Aerogels as a Function of Processing Method

9753096 PI：Broadbridge机构：Trinity College 薄膜二氧化硅气凝胶的微结构、光学和电学性质与加工方法的关系 通过溶胶-凝胶工艺制备的二氧化硅气凝胶是具有独特形态的高度多孔（通常为75%）材料，从而产生优异的热、声学、机械和电学性能。 虽然大块气凝胶已被广泛研究，但薄膜气凝胶尚未被研究到任何显著的程度，并且在许多电和热应用中具有显著的影响。 在这项研究中，Broadbridge教授将专注于薄膜二氧化硅气凝胶作为低k层间介电层的应用，并在集成电路技术中具有潜在的应用。 PI将在Trinity College和Brown University进行合作奋进。 所提供的资金将影响Trinity College的学生，使本科生接触到最先进的工程研究工作的挑战。 这笔资金也有望为布罗德布里奇博士提供与布朗大学建立长期研究关系的机会，从而使她能够建立一个重要的综合研究和教育计划。

9753096 PI : Broadbridge Institution : Trinity College Microstructural, Optical and Electrical Properties of Thin Film Silica Aerogels as a Function of Processing Method Silica aerogels, prepared by sol-gel processing, are highly porous (typically 75%) materials with unique morphology, resulting in exceptional thermal, acoustic, mechanical and electrical properties. While bulk aerogels have been studied extensively, thin film aerogels have not been studied to any significant extent, and promise significant impact in a number of electrical and thermal applications. In this study, Prof. Broadbridge will focus on the application of thin-film silica aerogels as low-k interlayer dielectrics with potential utilisation in intergrated circuit technology. The PI will engage in a collaborative research endeavor at Trinity College and Brown University. Funding provided will impact students at Trinity College, exposing undergraduates to the challenges of state-of-the-art engineering research endeavors. This funding is also expected to provide Dr. Broadbridge with opportunity to forge a long-lasting research relationship with Brown University, thereby allowing her to establish a significant integrated research and education program.