SBIR Phase I: In-Processing Femtosecond Energy Diffusion Sensing of Microscale Thermal Transfer in Thin Films

* 9760265霍洛 这个小企业创新研究第一阶段项目的目的是在微尺度热传递的过程中飞秒能量扩散传感的发展，以控制薄膜气相沉积过程。 激光技术的最新进展和微尺度传热模型的发展使得利用超短激光脉冲测量薄膜的热导率、弹性模量和厚度成为可能。第一阶段将研究开发工业版飞秒能量扩散传感器的可行性和成本效益，用于薄膜气相沉积过程中关键材料特性的在线测量。 将对化学气相沉积、溅射、电子束蒸发和等离子体沉积产生的薄膜进行测量。 微尺度热传输模型将用于将测量与材料特性（如热导率、弹性模量、缺陷浓度、晶粒尺寸和薄膜成分）相关联。 气相沉积工艺的反馈控制对于高性价比地制造高温超导体、先进光伏电池和热障涂层等先进薄膜材料至关重要。 工业版飞秒能量扩散传感器能够为各种气相沉积工艺的闭环提供所需的过程测量。 ***

*** 9760265 Hollo This Small Business Innovation Research Phase I project is aimed at development of in-process femtosecond energy diffusion sensing of microscale thermal transfer to control thin film vapor deposition processes. Recent advances in laser technology and the development of microscale heat transfer models have made it possible to use ultrashort laser pulses to measure the thermal conductivity, elastic modulus and thickness of thin films. Phase I will investigate the feasibility and cost effectiveness of developing an industrial version of a femtosecond energy diffusion sensor for in-process measurement of critical material properties during vapor deposition of thin films. Measurements will be made on thin films produced by chemical vapor deposition, sputtering, electron beam evaporation and plasma deposition. Micro-scale thermal transport models will be used to correlate the measurements to material properties such as thermal conductivity, elastic modulus, defect concentration, grain size and film composition.. Feedback control of vapor deposition processes is critical to the cost-effective manufacture of advanced thin film materials such as high-temperature superconductors, advanced photovoltaic cells and thermal barrier coatings. An industrial version femtosecond energy diffusion sensor has the capability to provide required in process measurements for closed-loop of a wide variety of vapor deposition processes. ***