SBIR Phase II: A New Active Vibration Control Method for Precision Machines

*9800937罗森塔尔这个小型企业创新研究第二阶段项目将为六自由度隔振台开发一种新的多通道控制器原型。新的工作台将减轻先进的亚微米线宽半导体生产和计量机械的振动。该控制器将一种新的多通道主动控制方法应用于振动主动控制。现有的振动控制工作台虽然足以在今天的半导体生产和测量设备中进行振动控制，但对于新兴的半导体技术来说将是不够的，在新兴的半导体技术中，六自由度工作台的振动必须控制在低得多的振动水平。现有的六自由度系统独立控制每个运动通道，这是一个不太可能的假设，除非并置，否则执行器和误差传感器是彼此分离的。因此，现有的工作台往往会变得不稳定，并且振动控制性能有限。一种新的算法通过允许对参考传感器和工作台运动的多个通道进行统一控制来避免这些困难。新控制器将扩展目前在多通道噪声消除器中运行的信号分离技术。在敏感的电子制造作业中，需要高度隔振的行业有望实现商业应用。特别是，深紫外光和X射线光刻、半导体临界尺寸和缺陷测量以及原子力和电子显微镜的操作都是这种新的隔振技术的目标。***

*** 9800937 Rosenthal This Small Business Innovation Research (SBIR) Phase II project will develop a new prototype multichannel controller for a six degree-of-freedom (DOF) vibration isolation table. The new table will mitigate vibration in advanced submicron line-width semiconductor production and metrology machinery. The controller will apply a new method for multi-channel active control to the active control of vibration. Available vibration control tables, while adequate for vibration control in today's semiconductor production and measuring equipment, will be inadequate for emerging semiconductor technology, in which six-DOF table vibration must be controlled to much lower levels of vibration. Existing six-DOF systems control each channel of motion independently on the unlikely assumption that, unless collocated, actuators and error sensors are decoupled from each other. As a result, existing tables tend to become unstable and to have limited vibration control performance. A new algorithm avoids these difficulties by permitting unified control of several channels of reference sensors and table motions. The new controller will extend signal separation technology that is now opertional in a multi-channel noise canceller. Commercial applications are expected in industries requiring a high degree of vibration isolation in sensitive electronics fabrication operations. In particular, operations in deep ultraviolet and X-ray lithography, semiconductor critical dimension and defect metrology, and atomic force and electron microscopy are targeted for this new vibration isolation technology. ***