Automated Extraction for Structured Design of MEMS Devices

微机电系统（MEMS）技术已经证明了批量制造微米级传感器和执行器系统的能力。稳定的MEMS制造工艺的可用性推动了MEMS设计复杂性的增加，并突出了CAD工具来帮助设计验证的需求。该项目正在开发用于自动提取设计验证所需的MEMS元件和组件的算法。这些算法依赖于(1)几何信息来分析各种机械元件的形状、大小和连通性；(2)基于材料强度的估计，以评估各种部件的相对刚度(3)与电子接口的连通性，以识别各种机械部件的功能。本研究调查了以下内容。确定适合与现有电子元件表示相连接的机械元件表示。评估从空间表示导出的仿真模型的效率。探索在提取算法中权衡仿真效率与仿真精度的方法。在各种MEMS器件的提取算法中寻找可靠性保证。

Micro-electro-mechanical Systems (MEMS) technology has demonstrated the capability of batch fabricating micron-sized sensor and actuator systems. The availability of stable MEMS fabrication processes has fueled an increase in MEMS design complexity, and highlighted the need for CAD tools to aid in design verification. This project is developing algorithms for automated extraction of MEMS elements and components needed for design verification. These algorithms rely on (1) geometric information to analyze shapes, size, and connectivity of various mechanical elements; (2) strength of material based estimations to assess relative stiffness of various components (3) connectivity with electronic interface to identify functionality of various mechanical components. This research investigates the following. Determining mechanical component representations that are suitable for interfacing with existing representations of electronic components. Evaluating the efficiency of simulation models derived from a spatial representation. Exploring approaches to trade-off simulation efficiency versus simulation accuracy in extraction algorithms. Finding soundness guarantees in the extraction algorithms for a wide variety of MEMS devices.