SBIR Phase II: Infrared Spectroscopic Ellipsometry

这个小型企业创新研究第二阶段项目将研究红外椭偏测量仪的新仪器和应用。第一阶段证明，可以建立一个具有显著优越的光谱范围、精度和应用灵活性的可行仪器。其次，它展示了重要的新应用。然而，仍有许多工作要做。第二阶段的目标包括开发更亮的光源，更好的探测器，扩大光谱范围，包括偏振器和延迟器在内的先进光学元件，现场应用，以及许多软件问题，包括各向异性，动态数据采集和部分去偏振，材料研究目标包括研究聚合物纳米尺度薄膜的新物理，III-V和III-V氮化物的微结构，以及展示低温(4K)红外椭圆仪的能力。J.A.Woollam Co.，Inc.拥有强大的商业化记录，并致力于将在本合同期间开发的仪器和应用程序商业化，目前使用可见光椭偏仪和FTIR光谱仪的行业是红外椭偏仪的潜在用户。例如：工业、大学和微电子领域的基础和应用研究。用途包括分析半导体中的掺杂分布、精确的光学常数、界面粗糙度，以及纳米级科学：复杂超薄膜的微结构和化学识别。

This Small Business Innovation Research Phase II project will investigate new instrumentation and applications of infrared ellipsometry. Phase I demonstrated that a viable instrument having significantly superior spectral range, accuracy, and flexibility in application can be built. Secondly, it demonstrated important new applications. However, much remains to be accomplished. Phase II objectives include development of brighter sources, better detectors, spectral range extension, advanced optical elements including polarizers and retarders, in situ applications, and numerous software issues including anisotropy, dynamic data acquisition, and partial depolarization, Materials research objectives include investigating new physics in polymeric nanometer-scale films, microstructures in III-V's and III-V Nitrides, as well as demonstrating low-temperature ( 4K) IR ellipsomctry capabilities. The J.A. Woollam Co., Inc. has a strong record of commercialization, and is deeply committed to commercialization of the instrumentation and applications developed during this contract, Industries presently using visible ellipsometers and FTIR spectrometers are potential users of infrared ellipsometry. For example: basic and applied research in industry, Universities, and microelectronics. Uses include analysis of doping profiles in semiconductors, accurate optical constants, interface roughness, and nanometer-scale science: microstructure and chemical identification in complex ultra-thin films.