Advanced Mechanical Testing of MEMS Materials

微电子机械系统(MEMS)是由气相沉积多晶硅和类似材料制成的微型压力传感器、加速度计等，具有小到1微米的特点。这项研究的第一个目标是开发这些材料的拉伸测试技术和程序，以确定材料的大小和应力的复杂程度是否影响它们的性能。第二个目标是开发新的试验方法来循环微小试件的强度并测量其对循环载荷的响应。这些新型结构材料的材料性能对于新型微器件的智能设计和寿命预测是必不可少的。

Microelectromechanical systems (MEMS) are tiny pressure transducers,accelerometers, etc. having features as small as 1 micrometer and fabricatedfrom vapor-deposited polycrystalline silicon and similar materials. The firstobjective of this research is to develop techniques and procedures fortensile testing of these materials in order to determine whether the size of thespecimen and the complexity of the stress affect their properties. Thesecond objective is to develop new test methods to cycle tiny specimens intension and measure their response to cyclic loading. Material properties of these new structural materials are required for intelligent design and life prediction of novel microdevices.***