POWRE: Thin Film Magnets Via Reactive RF Co-Sputtering

本项目探讨了通过反应射频共溅射制备的Sm/Nd:Fe/Co:N永磁体薄膜的内在和外在磁性能，以精细控制合金成分。反应溅射还允许精确地原位插入氮间隙，以提高磁性能，如提高居里温度，同时减少加工步骤的数量。研究了晶粒尺寸和二次相等微观组织特征对磁性能的影响。这些特征将通过工艺参数来控制，如正向功率、溅射压力和衬底温度，以及通过添加替代合金，如Mo、Ti、V、Zr、Cu和c。该项目的一个重要方面是澄清相图和由此产生的溅射化合物的微观结构-性能关系，这些关系可能与平衡值有很大差异。这是在研究和教育领域妇女专业机会（POWRE）计划下提供的一项研究加强补助金。本研究涉及磁记录介质、微机电系统、微传感器、微电机以及光子集成电路和单片微波集成电路中的集成隔离器和环行器。该项目还旨在加强本科生、研究生和代表性不足的学生的研究，并在薄膜加工和光电子学领域开发本科和研究生课程。该项目还将加强PI目前在K-12外展方面的活动。该项目由材料研究部和MPS OMA（多学科活动办公室）共同支持。＊＊＊

This project explores the intrinsic and extrinsic magnetic properties of permanent Sm/Nd:Fe/Co:N magnet films made via reactive rf co-sputtering for fine control of alloy composition. Reactive sputtering also allows precise in-situ insertion of nitrogen interstitials to enhance magnetic properties, such as elevated Curie temperatures, while reducing the number of processing steps. The effect of microstructural features, such as grain size and secondary phases, on the magnetic properties will be investigated. These features will be controlled through processing parameters, such as forward power, sputtering pressure, and substrate temperature, as well as through substitutional alloying additions such as Mo, Ti, V, Zr, Cu and C. An important aspect of the project is the clarification of phase diagrams and resulting microstructure-property relationships of sputtered compounds, which may vary substantially from equilibrium values.%%%This is a research enhancement grant made under the Professional Opportunities for Women in Research and Education (POWRE) program. This research has relevance to magnetic recording media, microelectromechanical systems, microsensors, micromotors and integrated isolators and circulators in photonic integrated circuits as well as monolithic microwave integrated circuits. The project also aims to enhance undergraduate, graduate, and underrepresented student research and to develop undergraduate and graduate courses in the area of thin film processing and optoelectronics. This project will also enhance the PI's current activities in K-12 outreach. The project is co-supported by the Division of Materials Research, and the MPS OMA(Office of Multidisciplinary Activities). ***