Research Equipment Grant for Development of a High-Speed Ultra-Accurate Six DOF Manipulator Based on Two-Dimensional Linear Motors

9977693 khorrami本项目将为基于二维直线电机的高速超精确六自由度机械臂开发一种新型机械臂，以加强和补充现有的研究成果。基于商用Sawyer电机的平面多机器人系统在整个工作空间内提供统一的性能，提供高速度、加速度和精度。它们还提供机械和运动学的简单性、模块化、大运动范围和机械接地的短路径。实际上这样的系统可以提供一个多机器人桌面制造系统。这些系统现在可以从多个制造商处获得，并用于从晶圆探测到电路板组装的一系列应用。平面机器人系统的使用已经大大增加，因为目前的趋势是更小的设备和要求更高的精度放置。不幸的是，主要是因为Sawyer电机作为开环微型步进电机运行，它们可能会错过步骤，有很长的稳定时间，并且由于电机和压板齿之间失去同步而导致其潜在能力不足。这些限制可以通过一种新颖的、非常高分辨率（0.12微米）的2D位置传感器来克服，这种传感器是由Ish-Shalom博士开发的，并获得了IBM的专利。PI在他的马达上装配了传感器。该传感器不仅为该电机的闭环控制提供了一种手段，因此具有更高的分辨率，而且通过主动阻尼可以减少电机的点对点移动时间，从而实现更好的沉降时间。此外，还可以获得更高的刚度。通过NSF对先前努力的支持，PI制造了传感器，为它们设计了外壳，并将传感器连接到电机上以实现反馈目的。这笔拨款将提供额外的设备，以开发基于二维索耶电机的六自由度机械手。机械手是直接驱动的，由三个索耶电机驱动。机械手机构基本上是一个三脚架与索耶电机在其基础上，以提供三脚架腿的直线运动。通过适当地协调电机，在三脚架的顶部产生三轴平移和三轴旋转。通过适当的三脚架设计和良好的运动学参数设计，可以在末端执行器产生大的平移（根据所使用的平台的大小，无限的X和Y以及几英寸的Z运动）和旋转（可能高达160度）。该设备将为补充PI目前的研究工作和开发上述六自由度机械手提供良好的基础。

9977693KhorramiThis project will develop a new type of robot arm for a High-Speed Ultra-Accurate Six DOF Manipulator Based on Two-Dimensional Linear Motors to enhance and complement and current research efforts. Planar multi-robot systems based on commercial Sawyer motors provide uniform performance over their entire workspace, offering high speeds, accelerations, and precision. They also offer mechanical and kinematic simplicity, modularity, large motion ranges, and a short path to mechanical ground. In fact such a system can provide a multiple robot table top manufacturing system. These systems are now commercially available from multiple manufactures and are used for a range of applications from wafer probing to circuit board assembly. Planar robot systems use has increased tremendously because of the current trend to smaller devices and the requirement for higher accuracy placement. Unfortunately, primarily because Sawyer motors are operated as open-loop micro-step motors, they can miss steps, have long settle times, and are operated short of their potential capabilities due to loss of synchrony between motor and platen teeth. These limitations can be overcome using a new novel, very high resolution (0.12um; microns), 2D position sensor that was developed by Dr. Ish-Shalom and patented by IBM. The PI has fabricated sensors to his motor. Not only this sensor provides a means for closed-loop control of this motor and therefore higher resolution, but also the point-to-point move time of the motor may be decreased through active damping to achieve better settling times. Furthermore, a higher stiffness may also be achieved. Through the NSF support of previous effort, the PI has fabricated sensors, designed housing for them, and have attached the sensors to the motors for feedback purposes. This grant will provide for additional equipment to develop a six degree-of-freedom manipulator based on two-dimensional Sawyer motors. The manipulator is direct drive and actuated by three Sawyer motors. The manipulator mechanism is basically a tripod with Sawyer motors at its base to provide linear motions of the tripod legs. By properly coordinating the motors, three-axis of translations and three-axis of rotations are produced at the top of the tripod. By proper design of the tripod and a good design of its kinematic parameters, large translations (unlimited X and Y depending on the size of platen used and a few inches of Z movement) and rotations (possibly up to 160 degrees) at the end-effector can, be generated. This equipment will provide an excellent basis to complement the PI's current research efforts and to develop the aforementioned six DOF manipulator.