Workshop: Manufacturing of Micro-Electro-Mechanical Systems; November 7-8, 2000; Orlando, Florida

该奖项是为了支持将于2000年11月7日至8日在佛罗里达奥兰多举行的美国机械工程师协会年度大会和展览会上举办的研讨会。 研讨会的目的是邀请来自工业界和学术界的与会者讨论微机电系统（MEMS）制造方面的研究合作机会。 虽然在几个关键领域取得了巨大的进展，但有四个领域对MEMS制造至关重要，其中基本的理解仍然存在争议。 这些是MEMS的基本现象，MEMS在传感系统中的应用，MEMS在致动器中的应用，以及MEMS的可靠性和封装。

This award is to support a workshop to be held in conjunction with the American Society of Mechanical Engineers Annual Congress and Exhibition, to be held in Orlando, Florida, November 7-8, 2000. The objective of the workshop is to invite participants from industry and academia to discuss opportunities for research collaboration in manufacturing of micro-electro-mechanical systems (MEMS). While tremendous progress has been made in several critical areas, there are four areas that are critical to the manufacturing of MEMS where the fundamental understanding remains at issue. These are the fundamental phenomena of MEMS, MEMS applications in sensing systems, MEMS applications in actuators, and MEMS reliability and packaging.