Development of Novel In-Situ Tests and Modeling for Integrated MEMS Research and Education

机构：NSF-土木和机械系统(Alison Flatau)PI：Kevin D.Murphy和Matthew R.Begley University of ConnecticutProposal#：0085122标题：为集成的MEMS研究和教育开发新型现场测试和建模300字项目摘要微电子机械系统(MEMS)的性能受到粘附力和表面能的强烈影响。在某些情况下，当部件进入粘连接触并不能继续执行其指定的任务时，这些量会导致设备故障。为了确定可接受的运行状态，我们需要在量化近距离引力和附着能的能力方面取得重大进展。该计划将开发(I)新的实验技术，以在现场表征这些量，以及(Ii)基于物理的模型，以预测粘着和粘合释放事件是关键因素时的部件性能。将研究模型MEMS系统的准静态和动态行为，重点研究粘着区和无粘着区之间的转换。这些研究将确定是否以及何时可以使用动态激励来启动和控制棍棒释放事件。这些信息可用于设计用于制造复杂MEMS的新型振动组装工艺。最先进的纳米压痕设备将与理想化的MEMS设备集成在一起，直接测量力和微米级的位移。除了已建立的用于纳米压痕系统的动态测量技术外，还将实施电子和光学测量的组合。在机械和电激励过程中，MEMS器件的粘着能、静电力和动态响应将被量化。测量的MEMS行为将被用来验证包含静电力和表面能量的分析和数值模型的组合。这些模型将被用来预测先验的瞬时动态响应，包括棍子和棍子释放事件。拟议的计划通过开发MEMS测试设施将研究和教育结合在一起。研究生和本科生研究助理将设计和制造测试装置，并将为模型开发做出贡献。学生们还将花时间与劳伦斯利弗莫尔国家实验室的微技术小组合作。

Agency: NSF - Civil and Mechanical Systems (Alison Flatau)PI's: Kevin D. Murphy and Matthew R. Begley University of ConnecticutProposal #: 0085122Title: Development of Novel In-Situ Tests and Modeling for Integrated MEMS Research and Education300 WORD PROJECT SUMMARY The performance of micro-electro-mechanical-systems (MEMS) is strongly influenced by adhesive forces and surface energies. In some regimes, these quantities cause device failure, when components come into sticking contact and cannot continue to perform their designated task. In order to identify acceptable operating regimes, significant advances are needed in our ability to quantify close range attractive forces and adhesion energies. This program will develop (i) novel experimental techniques to characterize these quantities in-situ and (ii) physics-based models to predict component performance when adhesion and stick-release events are critical factors. Both quasi-static and dynamic behavior of a model MEMS system will be studied, with an emphasis on the transition between sticking and no-stick regimes. These studies will determine if and when dynamic excitation may be used initiate and control stick-release events. Such information may be used to design novel vibratory assembly processes used to manufacture complex MEMS. A state-of-the-art nanoindentation facility will be integrated with an idealized MEMS device to directly measure forces and displacements at the micron level. In addition to established dynamic measurement techniques used in nanoindentation systems, a combination of electronic and optical measurements will be implemented. Adhesive energies, electrostatic forces, and the dynamic response of the MEMS device will be quantified during both mechanical and electrical excitation. The measured MEMS behavior will be used to validate a combination of analytical and numerical models that incorporate electrostatic forces and surface energies. These models will be used to predict a priori transient dynamic response, including stick and stick-release events. The proposed program integrates research and education through the development of a MEMS test facility. Graduate and undergraduate research assistants will design and fabricate test rigs and will contribute to model development. Students will also spend time collaborating with the Micro-Technology Group at the Lawrence Livermore National Laboratory.