GOALI: Creation of Crystalline Surfaces for Short Wavelength Light Emitters

这个大学-工业合作研究项目旨在通过对ZnO衬底加工产生的缺陷以及随后的薄膜同外延生长的基本理解，提高用于短波长的发光器件（蓝色/UV led和激光器）的晶体表面的制造能力。通过化学机械抛光和进一步的生长预处理技术制备ZnO衬底，然后在衬底上生长同外延薄膜。在表面加工的各个阶段产生的缺陷将检查与高能后向散射光谱，离子通道和扫描电学性质显微镜。这种理解将有助于确定在ZnO上生产超高质量外延薄膜的工艺条件。这一认识的发展有可能有助于成功地证明ZnO的同外延生长。这项工作将进一步促进先进的表面表征工具的发展，这些工具需要在纳米尺度上评估近表面损伤。俄克拉荷马州立大学、伊格尔-皮歇尔技术公司和洛斯阿拉莫斯国家实验室将进行广泛的合作。

This university-industry collaborative research project seeks to advance the capability for the manufacture of crystalline surfaces for use in short wavelength light emitters (blue/UV LEDs and lasers) by contributing to a basic understanding of the generation of defects resultant from the processing of ZnO substrates, and the subsequent homoepitaxial growth of films. ZnO substrates will be prepared by chemomechanical polishing and further pre-growth processing techniques, after which homoepitaxial films will be grown on the substrates. The defects generated at various stages of surface processing will be examined with high energy backscattering spectrometry, ion channeling and scanning electrical properties microscopy. This understanding will aid in identifying the processing conditions which show promise for producing ultra-high quality epitaxial films on ZnO. Development of this understanding has the potential to contributing to the successful demonstration of the homoepitaxial growth of ZnO. This work will further contribute to the development of advanced surface characterization tools which are needed for assessing near surface damage at the nanometer scale. An extensive collaborative effort involving Oklahoma State University, Eagle-Picher Technologies and Los Alamos National Laboratory will be undertaken.