SBIR Phase I: Ultrafast Total Organic Carbon (TOC) Analyzer for Water Recycling Systems

这一小型企业创新研究（SBIR）第一阶段项目致力于开发超快TOC分析仪，以实现半导体湿工作台用过的冲洗沃茨的实时回收。 目前，半导体制造设施每个晶片产生约3800加仑的废水排放，对于以100 gpm（加仑/分钟）操作的设施，这相当于每年5300万加仑的废水。 从半导体湿工作台回收用过的冲洗沃茨提供了一种可行的解决方案，以显著降低该制造工艺对环境的影响。 真实的实时在线监测关键污染物对于成功操作具有再循环和再利用能力的未来水系统是必要的。 第一阶段的研究将致力于开发微流控传感器，该传感器具有可靠的、超快的响应时间，可对半导体湿工作台的废r5 inse沃茨中发现的痕量有机污染物进行检测。 第一阶段设备的具体性能目标包括：30 s响应时间，30 ppb检测限，在10微西门子/厘米水电导率下运行，关键污染物的回收率为100% +/- 30%。将开发超快速TOC分析仪，实现半导体制造用水的实时循环，以减少对区域供水的需求。 这种新型的仪器将在半导体工业以及其他需要实时检测含水废水中有机污染物的制造环境中找到广泛的应用。

This Small Business Innovation Research (SBIR) Phase I project addresses the development of an ultrafast TOC analyzer to enable real-time recycling of spent rinse waters from semiconductor wet benches. At the present time, semiconductor fabrication facilities generate about 3800 gallons of wastewater discharge per wafer, which is equivalent to 53 million gallons of wastewater per year for facilities operating at 100 gpm (gallons per minute). Recycling spent rinse waters from semiconductor wet benches provides a viable solution to dramatically reduce the environmental impact of this manufacturing process. On-line monitoring of key contaminants in real time is necessary to successfully operate future water systems having recycle and reuse capabilities. Phase I research will be directed at developing microfluidic sensors having reliable, ultra-fast response times to trace concentrations of organic contaminants found in spent r5inse waters from simiconductor wet benches. Specific performance goals for Phase I devices include: 30 s response time, 30 ppb detection limit, operation in 10 microSiemen/cm water conductivity, and 100% +/- 30% recovery of key contaminants.An ultra-fast TOC analyzer will be developed that enables real-time recycling of water used by seimiconductor manufacturing to reduce their demand upon regional water supplies. This novel instrument will find widespread applications in the semiconductor industry as well as other manufacturing environments that require real-time detection of organic contaminants in aqueous effluent.