CAREER: Dynamics and Control of Integrated Microchemical Systems

摘要：微机械系统是新一代微型化学系统，它在精确制造的尺寸在几微米到几百微米范围内的三维微反应器结构中进行化学反应和分离。典型的微化学系统将流体处理和反应能力与电子传感和驱动相结合，使用集成电路（IC）制造技术制造，并使用硅和相关IC工业材料，聚合物，陶瓷，玻璃或石英作为其结构材料。这个综合研究和教育计划的目标是研究这种集成微化学系统的独特动态特性，并为这类微系统设计可实现的反馈控制技术开发一个框架。研究计划将围绕以下四个中心主题展开：(1)微化学系统的动态建模、仿真和动态分析；(2)基于模型的反馈控制器设计，采用基本模型、降阶模型和经验输入输出模型；(3)动态因素对微系统设计的影响；(4)在原型微化学系统上对控制器设计进行了实验验证。基本分布参数模型将用于分析微系统的非线性稳态和动态特性。本文将利用降阶模型和经验模型合成适合实验微化学测试系统的低阶模型控制器。来自分布式和边界控制理论的概念将被用于研究微化学系统的基于模型的反馈控制公式，并开发微系统控制器设计的技术框架。这些控制器算法的有效实现将通过使用实验原型微化学系统进行研究。与此研究计划相辅相成的是将研究成果转化为化学工程核心课程的重要教育工作。在研究生阶段，(a)将开发微化学系统流体模型和微反应器相平面分析的讲座模块，以纳入流体力学和反应器设计的核心研究生课程；(b)分布式和边界控制的讲座模块将被开发成研究生水平的多变量和非线性控制交叉列表选修课程。在本科阶段，以团队为基础的独立研究项目将通过三个途径进行：(a)利哈伊大学的学生创新机会（OSI）本科研究项目；(b)利哈伊大学夏季研究和学期研究学分；(c)桑迪亚国家实验室的暑期实习。此外，为了将微反应器概念作为“核心”概念纳入本科课程，将为以下课程开发讲座模块：(a)反应器设计，介绍微反应器作为另一种标准反应器；(b)过程控制，以演示微反应器的动态和常规控制；(c)工艺设计，展示集成微植物的微片设计、集成、合成和控制问题。与工业界的合作将通过匹兹堡数字温室（一个位于宾夕法尼亚州的微电子公司联盟）和一个国家实验室（通过与桑迪亚国家实验室的合作协议）来促进。

ABSTRACTPI: Msayuresh V. KothareInstitution: Lehigh UniversityProposal Number: 0134102Micromechanical systems are a new genergation of minature chemical systems that carry out chemical reactions and separations in precisely fabricated three dimensional microreactor configurations in the size range of a few microns to a few hundred microns. Typical microchemical systems combine fluid handling and reaction capabilities with electronic sensing and actuation, are fabricated using integrated circuit (IC) manufacturing techniques and use silicon and related IC industry materials, polymers, ceramics, glass or quartz as their material of construction. The goal of this integrated research and education program is to study the unique dynamic properties of such integrated microchemical systems and develop a framework for designing implementable feedback control techniques for this class of microsystems. The research program will evolve around the following four central themes (1) dynamic modeling, simulation and dynamical analysis of microchemical systems; (2) model-based feedback controller design using fundamental, reduced order and empirical input-output models; (3) impact of dynamical considerations on microsystem design; and (4) experimental verification of controller design on a prototype microchemical system. The fundamental distributed parameter modles will be used to analyze the nonlinear steady-state and dynamic properties of the microsystem. The reduced order models as well as the empirical models will be used to synthesize low-order model-based controllers suitble for implementation on the experimental microchemical test system. Concepts from distributed and boundary control theory will be employed to study the model-based feedback control formulation of microchemical systems and to develop a technical framework for microsystem controller design. Efficient implementation of these controller algorithms will be investigated by using the experimental prototype microchemical system. Complementary to this research program will be a signicant educational eort to translate the research results to the chemical engineering core curriculum. At the graduate level, (a) lecture modules on microchemical systems uid- ow modeling and microreactor phase-plane analysis will be developed for incorporation in the core graduate level courses in uid mechanics and reactor design; and (b) lecture modules on distributedand boundary control will be developed for incorporation in a graduate level cross-listed elective course on multivariable and nonlinear control. At the undergraduate level, team-based independent research projects will be dened through three avenues: (a) the Opportunities for Student Innovation (OSI) undergraduate research program at Lehigh; (b) summer research and semester research credit at Lehigh; and (c) summer internships at Sandia National Laboratories. In addition, to incorporate microreactor concepts as \core" concepts in the undergraduate curriculum, lecture modules will be developed for the following courses: (a) reactor design, to introduce a microreactor as yet another standard reactor; (b) process control, to demonstrate the dynamics and conventional control of microreactors; and (c) process design, to demonstrate the issues of micro owsheet design, integration, synthesis and control for integrated microplants. Collaboration with industry will be facilitated through the Pittsburgh Digital Greenhouse, a consortiumof microelectronics companies located in Pennsylvania, and a national laboratory through a collaborative agreement with the Sandia National Laboratories.