Development and Application of 3-D Measurement Methodologies at Reduced Length Scales

缩减长度尺度下三维测量方法的发展和应用摘要空间分辨率扩展到纳米尺度的平面或曲面物体上三维表面变形的定量测量方法的发展和应用是本研究工作的重点。这项研究的一个独特方面是强调3D计量学，以及开发适用于通用成像系统(例如扫描电子显微镜、光学系统)的方法，以识别和准确校正复杂图像失真。由此产生的方法的应用将包括研究(A)纳米结构材料的局部变形行为，(B)非均质材料的微尺度拉伸和弯曲测试，以及(C)经历分层的这种薄膜鼓泡/凸起试件。

Development and Application of 3D Measurement Methodologies at Reduced Length ScalesAbstractThe development and application of measurement methodologies for quantitative determination of three-dimensional surface deformations on planar or curved objects with spatial resolutions extending to the nanometer scale is the focus of this research effort. A unique aspect of the research is the emphasis on both 3D metrology and also the development of methodologies applicable to generic imaging systems (e.g., SEM, optical) for identification and accurate correction of complex image distortions. Applications of the resulting methodologies will include studies of local deformation behavior in (a) nano-structured materials, (b) micro-scale tensile and bending tests of non-homogeneous materials and (c) this-film blister/bulge specimens undergoing delamination.