Miniaturized MEMS Based Fiber Optic Distributed Health monitoring System for Civil Structures

PI名称和机构：法哈德·安萨里，伊利诺伊大学芝加哥分校提案编号：0220036提案标题：基于微型MEMS的光纤分布式土木结构健康监测系统项目摘要拟议研究的主要目标是发展在土木结构中以非常紧凑和便携的方式应用大量传感器的能力。这将通过将传感器系统的所有硬件组件(包括光学干涉仪和微处理器模块)压缩到单个微型单元中来实现。微制造方法将被用于开发微电子机械系统(MEMS)，其中将包括波导、微机械光学开关和旋转微镜。该系统将驱动一系列分布式光纤传感器，设计用于在大传感范围内传感结构扰动。将笨重的系统转换为微型化的MEMS设备将允许大规模生产MEMS传感器模块，以便根据需要集成到结构中。该传感系统将提供对过度应变、裂纹、分层、偏转、不均匀载荷分布、热冲击、冲击载荷和腐蚀的监控能力。这项研究的结果将对公共工程基础设施系统的安全、维护和高效运行产生巨大影响，这些基础设施系统包括建筑物、桥梁、大坝、隧道、海港、高速公路、管道、铁路和发电站等无数设施。这项研究将为土木工程专业的学生提供新的教育机会，因为他们将学习开发和使用现代工具来解决对国家公共工程基础设施非常重要的问题。参与这个项目的学生将从工程的不同研究领域中受益匪浅，特别是传感器技术、MEMS、结构测试和微型设备的工业封装。

PI Name and Institution: Farhad Ansari, University of Illinois at ChicagoProposal Number: 0220036Proposal Title: Miniaturized MEMS Based Fiber Optic Distributed Health monitoring System for Civil Structures Project AbstractThe primary objective of the proposed research is to develop capability for application of large numbers of sensors in a very compact and portable manner in civil structures. This will be accomplished by condensing all the hardware components of the sensor system, which includes optical interferometer, and microprocessor modules into a single miniaturized unit. The micro fabrication methodologies will be employed for development of the Micro Electro Mechanical Systems (MEMS), which will include wave-guides, and micro mechanical optical switches and rotating micro mirrors. This system will drive a series of distributed optical fiber sensors designed for sensing of structural perturbations within a large sensing range. Conversion of the bulky system into the miniaturized MEMS device will allow for mass production of MEMS-sensor modules for integration within structures as needed. The sensory system will provide monitoring capabilities for excessive strains, cracks, delaminations, deflections, uneven load distributions, thermal shocks, impact loads, and corrosion. The outcomes of this research will have a tremendous impact on safety, maintenance, and efficient operation of the public works infrastructure systems that include myriads of facilities such as buildings, bridges, dams, tunnels, seaports, highways, pipelines, railroads, and power generation stations. This research will provide new educational opportunities for civil engineering students, as they will learn to develop and work with modern tools to solve problems of great importance for the nation's public works infrastructure. Students involved in this project will benefit greatly by exposure to different research areas of engineering, particularly sensor technology, MEMS, structural testing, and industrial packaging of micro devices.