NER: Fabrication of One-Dimensional Horizontal Arrays of Carbon Nanotubes from Nano-Templates

在这个探索性的研究方案中，我们的目标是在我们垂直排列的碳纳米管的基础上，通过在硅衬底上水平排列的圆柱形纳米孔阵列来实现水平排列的碳纳米管的生长。最终目标是实现碳纳米管在衬底上水平排列的一维(1-D)阵列。这项研究有两个突破口。在第一个推力中，将通过几何和电场调制来实现铝阳极氧化水平排列的圆柱孔的制造。在第二项研究中，可以利用水平排列的纳米孔作为模板进行碳纳米管的生长，最终可以在硅衬底上水平排列的一维碳纳米管阵列。拟议工作的更广泛影响包括提高基础和应用研究的能力，加强多学科研究，通过有重点的研究生研讨会、研究生研究和有重点的教育推广来教育和培训未来的科学家和工程师。本文提出的研究将为基于碳纳米管的纳米机电系统(NEMS)集成基于碳纳米管的器件与微电路和基于碳纳米管的纳米电子器件奠定基础。这项研究的结果可能会导致晶体管、分子电子器件和量子器件的革命性制造技术。

In this exploratory research proposal, building upon our vertically aligned CNTs, we aim to achieve growth of horizontally aligned CNTs through Al2O3 nano-porous template, where arrays of cylindrical nano-pores are horizontally aligned on silicon substrate. The eventual goal is to achieve a one-dimensional (1-D) array of CNTs horizontally aligned on substrate. There are two thrusts in this research. In the first thrust, fabrication of horizontal arrays of cylindrical pores by anodic oxidation of aluminum will be carried out through geometric and electric field modulation. In the second thrust of research, growth of CNTs can be carried out using the horizontally aligned nano-pores as templates and eventually a 1-D array of CNTs horizontally aligned on silicon substrate can be achieved.The broader impacts of the proposed work include improvement of the capability for basic and applied research, enhancement of multidisciplinary research, education and training of tomorrow scientists and engineers in nanotechnology through focused graduate seminars, graduate research, and focused education outreach. The research proposed here would lay a foundation for carbon nanotube-based nano- electromechanical system (NEMS) that integrates the carbon nanotube-based devices with microcircuits and carbon nanotube-based nanoelectronic devices. The outcome of this research may lead to revolutionary fabrication technology for transistors, molecular electronic devices, and quantum devices.