NIRT: Molecular and Electronic Devices Based on Novel One-Dimensional Nanopore Arrays

该NIRT提案侧重于开发使用新型水平一维AAO阵列纳米模板制造量子和分子器件的创新工艺。这项研究分为四个主要方向。在第一个阶段，pi将改进一维水平AAO纳米结构的工艺，使用原子层沉积将一维纳米模板的孔径减小到1nm，并在硅衬底上生长水平排列的一维碳纳米管和纳米线阵列。在第二个推力中，pi将基于水平一维纳米线阵列制造单电子晶体管（SET）阵列。在第三项研究中，他们将利用水平一维纳米孔阵列制造线内分子结阵列，并利用水平一维碳纳米管阵列制造纳米级电极来隔离单分子。在第四篇论文中，他们将使用导电AFM表征纳米孔的水平一维阵列和单个线内纳米器件。提出的活动的智力价值是将自组装AAO模板技术推向与主流平面工艺技术兼容的高水平和大规模的器件集成。提议的工作的更广泛的影响包括关键的自下而上的自组装过程的重大进展，加强多学科研究，教育和培训未来的科学家和工程师在纳米技术。本文的研究将为基于纳米管和纳米线的量子和分子器件的高密度和大规模集成奠定基础。这种独特的水平一维结构将在分子传输的基本理解，新的制造过程和实际工业应用中找到广泛的应用。拟议的教育活动将加强研究生对多学科环境的参与，并通过重点教育外展影响阿巴拉契亚社区（经济萧条群体）。

This NIRT proposal focuses on development of innovative processes for fabrication of quantum and molecular devices use the novel horizontal 1-D AAO array nanotemplate. The research is divided into four main thrusts. In the first thrust, the PIs will refine the process for improving the 1-D horizontal AAO nanostructure, reduce the pore size of the 1-D nanotemplate down to 1 nm using atomic layer deposition, and grow a 1-D array of carbon nanotubes and nanowires aligned horizontally on the silicon substrate. In the second thrust, the PIs will fabricate single-electron transistor (SET) arrays based on the horizontal 1-D array of nanowires. In the third thrust, they will utilize the horizontal 1-D nanpore array for fabrication of in-wire molecular junction arrays and use the horizontal 1-D array of CNTs for fabrication of nanoscale electrodes to isolate single molecules. In the fourth thrust, they will characterize the horizontal 1-D array of nanopores and individual in-wire nanodevices using conductive AFM. The intellectual merit of the proposed activities is to advance the self-assembled AAO template technique toward high-level and large-scale integration of devices compatible with the mainstream planar process technology. The broader impacts of the proposed work include significant advancement of critical bottom-up self-assembly processes, enhancement of multidisciplinary research, education and training of tomorrows scientists and engineers in nanotechnology. The research proposed here will lay a foundation for high-density and large-scale integration of nanotube and nanowire-based quantum and molecular devices. This unique horizontal 1-D structure will find broad applications in basic understanding of transport of molecules, new fabrication procedures, and practical industrial applications. The proposed education activities will enhance the involvement of graduate students in the multidisciplinary environment and also impact Appalachian communities (economically depressed group) through focused education outreach.