Microsensor and Actuator I/UCRC

MEMS是一个重要的研究领域，在医疗保健、安全、安全和节能等领域具有重要的应用前景。商业应用范围从微型加速度计，到微型泵，到百万镜面投影显示器，到无线传感器的自我发现网络，再到光学微型扫描仪。NSF参与这一重要的纳米技术领域将进一步刺激微纳设备的研究和开发，并对提高这些设备和其他设备的设计、制造、精度和利用率产生重大影响。NSF的这种投资最终将对美国的经济健康和全球竞争力产生重大而有益的影响。该奖项是工业/大学微型传感器和执行器合作研究中心为期5年的第二个阶段。1998年，I/UCRC伯克利传感器和执行器中心(BSAC)从这一领域正在进行的研究扩展到新领域的研究，在加州大学戴维斯分校设有多所大学。

MEMS is an important research field with promise of significant applications in a variety of areas, including healthcare, security, safety, and power conservation. Commercial applications range from micro-accelerometers, to micro-pumps, to million mirror projection displays, to self-discovering networks of wireless sensors, to optical micro-scanners. NSF participation in this important area of nanotechnology will further stimulate research and development of micro and nano devices and have a significant impact on improving the design, manufacture, accuracy, and utilization of these and other devices. Such investments by NSF will ultimately have a significant and beneficial effect on the economic health and global competitiveness of the United States. This award is the second 5-year phase of the Industry/University Cooperative Research Center for Micro-sensors and Actuators. In 1998, the I/UCRC Berkeley Sensor and Actuator Center (BSAC) was extended from on-going research in this area to research in new areas with a multi-university component at UC-Davis.