Development of Instrumentation for Measurement of Microscopic Dynamic Motions in Physical Systems

微电子机械系统(MEMS)的动力学行为、超声波焊接过程中的微观焊接区动力学、用于裂纹无损评估的声-红外成像、纳米复合材料的振动辅助加工以及微观振动声源的成像都是韦恩州立大学(WSU)目前或提议的多学科研究计划的主题，所有这些研究工作都将通过增加精确测量复杂高频微观运动以及这些运动在物理系统中有限区域的分布的能力而得到显著加强。WSU目前没有这种测量能力，该项目通过概述系统采购和开发新仪器的计划来满足这一需求。采购和开发活动紧密结合在一起。微扫描激光测振仪能够在微米级区域执行与离面情绪相关的全模式分析，而新的3-D纳米成像仪将被开发来提供纳米级区域的全3-D运动测量。提出的三维纳米成像仪将采用两种方法，一种是基于逆散射相位恢复的新的光学测量方法，另一种是基于频闪干涉仪的三维测量技术。这两种制度的出现都是出于以下原因；(1)新开发的三维纳米成像系统产生的运动测量必须通过与独立测量进行比较来验证，而微扫描激光测振仪系统将提供这种验证能力；(2)微扫描激光测振仪系统可以测量微米级系统的平面外运动，而所开发的三维纳米成像系统将把测量能力扩展到纳米级系统的全三维运动；(3)微扫描激光测振仪系统将立即用于我们的研究购买和安装，而三维纳米成像系统的开发预计至少需要一年的时间，(4)这两个系统都可以在一定程度上用于本提案所述的所有研究项目。使用所需仪器进行的研究成果将显著增加以下领域的知识库：MEMS器件、基于传感器的测试、超声波焊接、材料和结构的无损检测、纳米复合材料的加工以及噪声和振动源的成像。研究生和本科生将接受使用最先进的仪器进行最先进的技术培训。这项研究的结果也将成为大量当地工程师、本科生和研究生，特别是来自代表性不足的群体的课程项目的来源。

AbstractDynamic behavior of microelectromechanical systems (MEMS), microscopic weld-zone dynamics duringultrasonic welding, sonic-infrared imaging for non-destructive evaluation of cracks, vibration-assistedprocessing of nanocomposites and imaging of microscopic vibro-acoustic sources are all subjects of currentor proposed multidisciplinary research programs at Wayne State University (WSU), and all of theseresearch efforts would be significantly enhanced by adding the capability for precise measurement ofcomplex high frequency microscopic motions and the distribution of those motions over finite regions inphysical systems. Such measurement capabilities are not currently available at WSU, and this projectaddresses that need by outlining a program for systematic acquisition and development of new instruments.The acquisition and development activities are tightly integrated. The micro scanning laser vibrometer has the capability to perform full modal analyses related to out-of-planemotions in micron-sized regions, while the new 3-D Nano-imager will be developed to provide full 3-Dmotion measurements of nanometer-sized regions. The proposed 3-D Nano-imager will be developedusing two methods, a new optical measuring method based on the inverse scattering phase retrieval, andstroboscopic interferometer based three dimensional (3D) measurement technology. Both systems areneeded for the following reasons; (1) motion measurements generated by the newly developed 3-D Nano-Imagersystem must be validated by comparison with independent measurements, and the micro scanninglaser vibrometer system would provide that validation capability, (2) the micro scanning laser vibrometersystem can measure out-of-plane motions of micron-sized systems, whereas the developed 3-D Nano-Imagersystem will extend the measurement capabilities to full 3-D motions of nanometer-sized systems,(3) the micro scanning laser vibrometer system would be available for our research immediately uponpurchase and installation, whereas it is anticipated that the development of the 3-D Nano-Imager systemwill take at least one year, (4) both systems can be used to some degree in all of the research projectsdescribed in this proposal. The outcome of the research conducted with the requested instruments will addsignificantly to the knowledge base in the areas of MEMS devices, sensors based testing, ultrasonicwelding, nondestructive testing of materials and structures, processing of nanocomposites, and imaging ofnoise and vibration sources. Graduate and undergraduate students will be trained in state-of-the-arttechniques using state-of-the-art instruments. The results of the research will also be a source of course projects for a large pool of local engineers, undergraduate and graduate students, particularly from underrepresented groups.