SBIR Phase II: Low Cost Visible Blind Ultra Violet Photodetectors on Glass and Polyimide

这一小型企业创新研究项目建议将成功制造和测试的创新氧化物可见光和日盲紫外光探测器商业化。这些研究清楚地表明，在玻璃、石英、硅、聚酰亚胺等低成本衬底上生长高质量的宽带隙可调氧化物薄膜的可能性很大，用于光导和肖特基UV光电二极管。在这些衬底上制作的探测器表现出与蓝宝石上的AlGaN和碳化硅相当的性能，具有高响应性和三个数量级以上的紫外可见光抑制比。通过对宽禁带氧化层成分控制的创新，实现了探测器在选择紫外区调谐性能的可行性。该公司将扩展这项技术，将用于个人安全和消费品的紫外线辐射监测系统的低成本紫外线探测器和大尺寸探测器阵列商业化，并开发现有Si、GaAs和AlGaN技术范围之外的额外能力。

This Small Business Innovation Research project proposes commercialization of innovative oxide based visible and solar blind ultra-violet light detectors successfully fabricated and tested. The studies clearly indicate the possibility of growing good quality wide band gap tunable oxide thin films on low cost substrates such as glass, quartz, silicon, and polyimide for photoconductive and Schottky UV photodiodes. The detectors fabricated on these substrates show comparable performance to those of AlGaN on sapphire, and SiC with a high responsivity and UV to visible rejection ratio of more than three orders of magnitude. The feasibility of tuning the detector performance at selective UV regions is also successful which is achieved through innovation of the composition control in the wide band gap oxide layer. The company will extend this technology to commercialize the low cost UV detectors and large format detector arrays for UV radiation monitoring systems for personal safety and consumable products, and exploit additional capabilities beyond the scope of the existing Si, GaAs, and AlGaN technologies.