Micromachined Infrared Spectometer

该提案建议利用首席研究员在微机械非制冷红外探测器方面的专业知识，开发微型微机械光学光谱仪，其总尺寸为毫米量级，能够在长波红外区域（1-15米）工作。光谱仪的小型化具有挑战性，因为高光谱分辨率通常需要大的光路。在微机械光学光谱仪的情况下，光路将相对较短，从而限制了光谱分辨率。然而，微机械加工提供了以低成本大规模生产设备的能力。一些应用，如气体监测，不需要高光谱分辨率;至少作为第一道防线，本地预警传感器用于监测受控工作环境中有毒气体的存在。具有可穿戴的低成本光谱仪的能力将有利于环境安全和维护安全的工作场所。微机械光谱仪还可以监测建筑物中的二氧化碳，作为通风系统的传感器。智力优势：这项研究将开发在1-15米波长范围内工作的微机械红外光谱仪。微机械微测辐射热计将用于检测辐射，使得单个类别的检测器可以测量整个光谱上的辐射能量。法布里-珀罗和腔干涉仪将通过数值模拟和实验表征进行研究。红外显微光谱仪将使用CorningIntellisense Intellisuite CAE工具进行设计和模拟。将研究不同光谱仪几何形状的性能限制和设计权衡。红外显微光谱仪将使用Kronos Foundry Service和UTA Nanofab的制造设施制造。一个相对较新的材料家族，GeOx和SixGe 1-xOy，将被调查的温度计中采用的微测辐射热计。西班牙马德里理工大学的研究人员测量到这些材料的电阻温度系数（R-1 dR/dT）高达4.2%/K，并在体微机械微测辐射热计中表现出良好的性能。这些材料具有在室温下容易通过射频溅射沉积并且是常规集成电路材料的氧化物的优点。这项调查将寻求进一步的调查GeOx和SixGe 1-xOy的应用，非制冷红外探测和使用表面微加工与聚酰亚胺牺牲层，以证明更高的性能在微测辐射热计（探测率的目标为10 8至10 9厘米赫兹1/2 /W）。这部分研究的结果也将影响微测辐射热计在夜视中的应用，以及光学光谱仪的应用。更广泛的影响：研究结果将通过传统的会议报告和期刊文章以及出版一个基于网络的微加工光谱仪教程广泛传播，该教程是针对普通公众而不是科学家和工程师编写的。

This proposal proposes to utilize the principal investigator's expertise in micromachined uncooled infrared detectors to develop miniature, micromachined optical spectrometers whose total dimensions are on the order of millimeters that are capable of operating up to the long-wave infrared region (1-15 m). The miniaturization of an optical spectrometer is challenging because high spectral resolution generally requires large optical paths. In the case of a micromachined optical spectrometer, the optical paths will be relatively short limiting the spectral resolution. However, micromachining offers the ability to mass-produce the devices at low cost. Some applications such as gas monitoring do not require high spectral resolution; at least as a first line of defense, local early warning sensor for monitoring the presence of a toxic gas in a controlled working environment. The ability to have wearable, low cost optical spectrometers would be advantageous to environmental safety and maintaining a safe work place. Micromachined spectrometers could also monitor carbon dioxide in buildings, serving as a sensor for ventilation systems.Intellectual Merit: This investigation will develop micromachined infrared spectrometers operating in the 1-15 m wavelength range. Micromachined microbolometers will be used to detect the radiation such that a single class of detector can measure the radiant energy over the entire spectrum. Fabry-Perot and cavity interferometers will be investigated through numerical simulation and experimental characterization. The infrared microspectrometers will be designed and simulated using the CorningIntellisense Intellisuite CAE tool. The performance limits and design trade-offs for different spectrometer geometries will be investigated. The infrared microspectrometers will be fabricated using the Kronos Foundry Service and the fabrication facilities at the UTA Nanofab. A relatively new material family, GeOx and SixGe1-xOy, will be investigated as the thermometer employed in the microbolometer. Researchers at Univeridad Politecnica de Madrid, Spain have measured the temperature coefficient of resistance (R -1 dR/dT) in these materials to be as high as 4.2%/K and demonstrated good performance in bulk micromachined microbolometers. These materials have the advantage of being easily deposited by rf sputtering at room temperature and being oxides of conventional integrated circuit materials. This investigation will seek to further the investigation of the application of GeOx and SixGe1-xOy to uncooled infrared detection and the use of surface micromachining with polyimide sacrificial layers to demonstrate higher performance in the microbolometers (detectivity goal of 10 8 to 10 9 cm Hz 1/2 /W). The results of this part of the investigation will also impact microbolometer applications in night vision, in addition to optical spectrometers applications.Broader Impact: The results of the investigation will be distributed widely through traditional conference presentations and journal articles as well as by publishing a web-based tutorial on micromachined spectrometers that is written to target the general public rather than scientists and engineers.