CAREER: Advanced Temperature Compensation Techniques for Integrated Bulk-Mode Micro and Nano Mechanical Resonators

这项职业计划旨在研究和实现集成纳米级换能器的高频(1-50 GHz)和高质量因数(Q)体模微纳机械谐振器的新型集成温度补偿技术。提出的活动的智力优点是：1.在不降低谐振器Q的情况下，开发集成的微、纳米机械谐振器温度灵敏度的自补偿技术(无烤箱)。实现集成纳米级换能器的高Q体模纳米机电谐振器，谐振频率深入千兆赫兹范围(1-50 GHz)；拟议活动的更广泛影响为：-首次实现温度补偿的集成微/纳米机械谐振器，频率温度系数接近零(零-TCF)，使在许多时钟、计时和频率参考应用中用片上硅电机谐振器取代石英晶体成为可能。-高性能GHz频率集成谐振器的开发将使温度稳定的高频滤波器与射频电路的集成成为可能。这种滤波器目前是在芯片上集成高性能射频系统的瓶颈。-体模纳米机械谐振器在空气和液体中将具有高Q(在1000‘S)，同时具有高频率和非常小的质量。这项提议的活动不仅将在纳米机电设备和系统领域带来重大的科学发现，还将通过开发此类系统的纳米级机电积木的集成解决方案，实现新的低成本、单芯片、高精度的射频传感微节点。

This CAREER proposal is aimed at the investigation and implementation of novel integrated temperature compensation techniques for high frequency (1-50GHz) and high quality factor (Q) bulk-mode micro and nano mechanical resonators with integrated nanoscale transducers. The intellectual merits of the proposed activity are:1. To develop integrated self-compensation techniques (oven-less) for temperature sensitivity of high-Q micro and nano mechanical resonators, without deteriorating the Q of the resonator.2. To implement high-Q bulk-mode nano-electromechanical resonators with integrated nanoscale transducers, and resonant frequencies deep into the Gigahertz range (1-50GHz);The broader impacts of the proposed activity are:- For the first time, it will result in the realization of temperature-compensated integrated micro/nanomechanical resonators with near zero temperature coefficient of frequency (zero-TCF), making it possible to replace the quartz crystals in numerous clocking, time keeping and frequency referencing applications with on-chip silicon electromechanical resonators. - The development of high performance GHz-frequency integrated resonators will make the integration of temperature-stable high frequency filters with RF circuits possible. Such filters currently present a bottleneck to the integration of high performance RF systems on a chip.- Bulk-mode nanomechanical resonators will have high Q (in the 1000's) in air and in liquid, while having high frequencies and very small mass. This will lead to the realization of precision resonant biochemical and biological sensor arrays at the nanoscale.The activities of this proposal will not only bring about significant scientific discoveries in the area of nano-electromechanical devices and systems, but will also enable realization of new low-cost, single-chip, precision RF-sensory micro-nodes by developing integrated solutions for nanoscale electromechanical building blocks of such systems.