NER: Processing and Characterization of Functionalized Polymers for Micro/Nano Systems

目的是评估SU-8光敏聚合物与官能化导电纳米颗粒的加工以及材料行为的相关变化。复合材料的机械性能可以通过降低膜应力和产生在具有大的顺应性变化的两个表面（例如硅和生物组织）之间分级机械性能的能力来增强。该计划将提供SU-8分子与纳米晶体相互作用的初步数据，以及对多尺度材料模型评估和改进的“体”性质的影响。然而，固化时的材料收缩（7.5%）和膜应力（16- 19 Mpa）已经成为其用于制造从晶片衬底释放的聚合物微器件的障碍。SU-8的纳米复合材料最近已被证明，然而，工艺参数变化的影响以及由此产生的材料和机械性能是未知的。目标包括未固化特性、工艺参数和固化材料行为之间的关系的评估。这将通过设计实验来完成，以评估功能关系。将通过显微镜、傅里叶变换红外光谱（FTIR）以及机械和电气表征评估结局。评估将包括机械梁弯曲和共振测试，以评估刚度和滞弹性。这项工作的智力价值包括纳米制造技术的发展和进步，用于创建基于聚合物的微/纳米系统。该计划将促进新结构，新材料的设计，制造和表征，以及无硅及其广泛的配套基础设施的新传感和驱动解决方案的开发。这项工作将通过降低成本，时间和设施的传统障碍，促进跨学科研究的广泛影响，这些障碍通常与将微尺度和纳米尺度设备用于生物，化学和环境研究中的分析和操作有关。

The objective is to evaluate the processing of SU-8 photosensitive polymers with functionalized, conductive nanoparticles and associated changes in material behavior. Mechanical properties of the composite material can be enhanced by reducing film stresses and creating an ability to grade mechanical properties between two surfaces with large variation in compliance, e.g. silicon and biological tissues. This program will provide initial data on the interaction of SU-8 molecules and nanocrystals and the effects on "bulk" properties for evaluation and refinement of multi-scale material models.SU-8 is mechanically stable, tough, transparent in UV and visible light spectra, extremely inert chemically, and biocompatible; however, the material shrinkage (7.5%) and film stress (16-19Mpa) upon curing have been barriers to its adoption for the manufacture of polymer microdevices freed from the wafer substrate. Nanocomposites of SU-8 have been demonstrated recently, however the effect of process parameter variation and the resulting material and mechanical properties are unknown. The goals include the evaluation of relationships between uncured characteristics, process parameters, and cured material behavior. This will be accomplished with designed experiments to evaluate the functional relationships. Outcomes will be assessed by microscopy, Fourier Transform Infrared Spectroscopy (FTIR), and mechanical and electrical characterization. Evaluations will include mechanical beam bending and resonance tests to evaluate stiffness and anelasticity.The intellectual merit of this work includes the development and advancement of nanomanufacturing techniques for the creation of polymer based micro/nano-systems. This program will facilitate the design, fabrication, and characterization of new structures, new materials, and the development of new sensing and actuating solutions without silicon and its extensive accompanying infrastructure. This work will have broad impact in facilitating interdisciplinary research by lowering the traditional barriers of cost, time, and facilities often associated with incorporating microscale and nanoscale devices for assay and manipulation in biological, chemical, and environmental research.