SST: CAD Tools and Verification for Resonator-Based Sensor Technology

基于谐振器的传感器技术的CAD工具和验证传感技术的主要工作集中在传感元件的小型化上。在传感系统的开发上投入了大量资金，这些传感系统可以整合到自主微机电系统（MEMS）中，以满足广泛的无线传感需求，从监测建筑物和桥梁的安全，到检测跨大地理区域的大气化学危害的电子鼻，再到监测通信通道的电子耳，仅举几例。成功部署这种系统的一个关键是克服传感器节点的能量需求。请注意，传感器不仅需要能量来感知，还需要能量来进行通信。体声波谐振器（bawr）是解决这些问题的一项有吸引力的技术；在几微米的MEMS尺度上，这些器件工作在GHz范围内（手机频率）。与替代技术相比，bawr可以用作化学传感器的高质量频率参考，信号处理滤波网络的元件，以及无线通信系统的元件，所有这些都以非常低的功耗进行。在最近发表的概念验证实验中，我们看到了这种设备的许多前景。然而，仔细阅读这些出版物表明，虽然bawr的一般工作原理是已知的，但基于谐振的MEMS传感器设计人员理解预期系统行为的准确性明显不足。本提案旨在通过开发免费的计算机辅助设计（CAD）工具来帮助纠正这一缺陷，并促进成功的BAWR设备的更快速开发。这个跨学科的研究小组不仅打算开发一种CAD工具，而且还打算进行实验来验证其准确性。他们的CAD软件设计用于准确预测谐振器质量下降，包括热弹性阻尼、固有材料损耗和锚定（或夹紧）损耗。他们将通过直接查看谐振器行为的控制偏微分方程（PDEs），以一种新的方式为MEMS社区解决问题，然后使用先进的krylov模型简化方法抽象出小型，准确和快速的设计级计算模型。他们方法中的新颖方面包括一个建模系统，该系统将自动分离彼此不同的阻尼效应，并为创建迄今未知的bawr提供新的虚拟实验。最后一点的关键是他们提出的为CAD工具开发优化模块的建议，该模块将允许优化目标性能参数，例如传递函数，这是更高级别传感器节点设计所需的。拟议工作的组成部分将是多晶和单晶bawrs的制造，这将测试模型，帮助改进它们，并测试耦合谐振器设计中的新概念。团队成员包括材料建模、科学计算和MEMS设计与制造方面的专家。他们打算在创造新的MEMS器件以及创造和传播MEMS设计软件方面建立过去的成功。本提案中要解决的科学问题对社区至关重要。但除了这些优点之外，值得注意的是，该提案将对开发社区研究基础设施产生更广泛的影响，因为要开发的软件将免费分发。在人力资源方面，提议者将通过将半导体工程与机械建模和科学计算相结合的训练，在一个高度跨学科的领域培养学生，以实现更广泛的目标。社会急需这样的毕业生。申请者还计划从伯克利工程研究暑期本科生项目（SUPERB）中招聘。该项目旨在接触工程领域的弱势群体，为他们提供高质量的研究经验，并鼓励他们渴望获得研究生学位。pi过去已经成功参与了这个项目。

SST: CAD Tools and Verification for Resonator-Based Sensor TechnologyA major effort in sensing technology centers about the miniaturization of sensing elements.Much investment is being expended upon the development of sensing systems that can be incorpo-ratedinto autonomous micro-electrical-mechanical systems (MEMS) for widespread wireless sensingneeds ranging from monitoring buildings and bridges for safety, to electronic noses for detectingatmospheric chemical hazards across wide geographic areas, to electronic ears for monitoring com-municationchannels just to name a few. One key to the successful deployment of such systemsis overcoming the energy needs of sensor nodes. Note that sensors need power not only to sensebut also to communicate. An attractive technology for dealing with many of these issues is bulk-acousticwave resonators (BAWRs); at the MEMS scale of a few microns these devices operate inthe GHz range (cell phone frequencies). BAWRs can be used as high quality frequency referencesin chemical sensors, elements of signal processing filter networks, and as elements of wireless com-municationsystems all at very low power compared to alternate technologies. Much of the promiseof such devices has been seen in proof-of-concept experiments that have recently been published.However, a careful reading of these publications shows that while the general operating principlesof BAWRs are known, there is a distinct lack of accuracy to which resonant-based MEMS sensordesigners understand expected system behavior. This proposal intends to help rectify this defi-ciencyand to promote more rapid development of successful BAWR devices by developing freelyavailable computer aided design (CAD) tools.This interdisciplinary team of researchers intends to not only develop a CAD tool but to alsoconduct experiments to verify its accuracy. Their CAD software is designed to accurately predictresonator quality degradation from thermoelastic damping, intrinsic material losses, and anchor(or clamping) losses. They will tackle the problem in a new way for the MEMS community bylooking directly to the governing partial differential equations (PDEs) for the resonator behaviorand then abstracting small, accurate, and fast models for design level computations using advancedKrylov model reduction methods. Novel aspects in their approach include a modeling system thatwill automatically separate different damping effects from each other and make possible new virtualexperiments for the creation of heretofore unknown BAWRs. Key to this last point is their proposalto develop an optimization module for the CAD tool that will allow for the optimization of targetedperformance parameters, such as transfer functions, that are needed for higher level sensor nodedesign. Integral to the proposed work will be the fabrication of poly- and single-crystal BAWRsthat will test the models, help refine them, and test new concepts in coupled resonator designs.The team make-up includes experts in material modeling, scientific computing, and MEMS designand fabrication. They intend to build upon their past successes in creating new MEMS devicesand in creating and disseminating MEMS design software.The scientific questions to be addressed in this proposal are of a critical importance to thecommunity. But beyond these merits, it is noted that the proposal will have the broader impactof developing the community's research infrastructure as the software to be developed will be dis-tributedfreely. On the human resource side the proposers will fill a broader objective by trainingstudents in an highly interdisciplinary field by combining training in semi-conductor engineeringwith mechanical modeling and scientific computing. Such graduates are sorely needed in the com-munity.The proposers additionally plan to recruit from the successful Summer UndergraduateProgram in Engineering Research at Berkeley (SUPERB). This program aims to reach out tounder-represented groups in engineering and provide them with a high quality research experienceand encourage them to aspire to graduate degrees. The PIs have successfully participated in thisprogram in the past.