Device Physics of Nanoscale Electronic Devices beyond the Technology Roadmap

本研究的目的是研究基础物理学，这对于成功地为传统场效应管引入新材料和评估拟议的新型隧道器件至关重要。该方法是收集带到带隧道的实验数据，具有非常陡峭的掺杂曲线，适合未来的纳米级器件。在应变硅，锗和半导体纳米线中的带对带隧道将被研究。带到带隧道的数值模型将用实验数据进行校准/验证，随后用于研究器件设计空间，并检查纳米级场效应管的最终缩放极限，包括非状态泄漏的影响。本文将研究一种具有亚阈值关断特性的新型隧道装置。这些设备显然超出了目前半导体行业的技术路线图。目标是找到减少有源器件失态电流的解决方案。该计划的更广泛的影响方面将促进纳米电子学劳动力的多样性，提供智力技术转移，研究和教育的整合，公共教育和促进伙伴关系。教育和推广计划的目标是纳米电子学的机会-这是保持美国在全球经济中的领导地位的重要领域。这项建议的一个组成部分是关于纳米科学和纳米技术的公众教育。通过让科学记者参与这个研究项目，将通过改进各种媒体的科学报道，提高公众对科学技术的理解。作为回报，科学记者将参与教育未来的科学家（学生）如何有效地向公众传播科学概念。

The objective of this research is to study the fundamental physics that is essential to both the success of introducing new materials for conventional FETs and the assessment of proposed novel tunneling-based devices. The approach is to gather experimental data of band-to-band tunneling with extremely steep doping profiles appropriate to future nanoscale devices. Band-to-band tunneling in strained silicon, germanium, and semiconductor nanowires will be studied. Numerical models for band-to-band tunneling will be calibrated/verified with the experimental data and subsequently employed to study the device design space and examine the ultimate scaling limits for nanoscale FETs including the effects of off-state leakage. Novel tunneling-based devices with sharp subthreshold turn-off characteristics will be studied. These devices are clearly beyond the present technology roadmap of the semiconductor industry. The goal is to find solutions to reduce the off-state current of active devices. The broader impacts aspects of this program will advance diversity in the nanoelectronics workforce and provide intellectual technology transfer, integration of research and education, public education, and promotion of partnerships. The educational and outreach programs target opportunities in nanoelectronics - an important area to maintain US leadership in a global economy. An integral component of this proposal is public education on nanoscience and nanotechnology. By engaging science journalists in the research program, public understanding of science and technology will be enhanced through improved science reporting in various media. In return, the science journalists will join in educating the future scientist (the students) on effective communication of science concepts to the general public.