GOALI: Development of Block Copolymer Self-assembly for Next Generation Device Fabrication

定向嵌段共聚物自组装是解决传统光刻技术在先进半导体工艺中存在的问题的最有前途的技术之一。与传统的光刻技术相比，嵌段共聚物自组装技术以更低的成本和更高的产量提供了20 nm以下的特征，尽管缺陷和精确定位是需要解决的基本研究课题。该项目的目标是解决将定向嵌段共聚物自组装技术集成到电路级实际集成器件制造工艺中的这些挑战，并展示下一代器件的关键特征的制造。提出了嵌段共聚自组装和引导模板图案化方法作为概念验证，分别用于制造超高密度存储阵列和用于高密度硅电路的亚20 nm接触孔。该项目的影响范围更广，既包括基础研究，也包括大学-工业界面的商业制造。该项目可以直接促进嵌段共聚自组装技术作为传统光刻技术的经济高效扩展，用于制造下一代器件，极大地惠及半导体制造业和更广泛的电子行业。这也将极大地促进聚合物材料设计的研究，以获得更好的功能性能。作为面向更广泛社会的一部分，将制作几个视频剪辑并发布到公共网站上，帮助学生了解自我组装的科学和技术。这种校企合作为参与的学生在基础研究和工业制造交界处的多学科环境中提供了一个极好的培训场所。

Directed block copolymer self-assembly is one of the promising technologies to solve the problems of conventional lithography for advanced semiconductor technologies. In contrast to conventional lithography, block copolymer self-assembly provides sub-20 nm features with lower cost and higher throughput, though defects and precise positioning are fundamental research topics that need to be addressed. The goal of this project is to address these challenges for integrating directed block copolymer self-assembly technology into practical integrated device fabrication process at the circuit level and demonstrate the fabrication of the key features for next generation devices. Block copolymer self-assembly and guided template patterning methods are proposed as a proof of concept demonstration for fabricating ultra-high density memory arrays and sub-20 nm contact holes for high-density silicon circuitry, respectively. The broader impacts of this project cover both fundamental research and commercial manufacturing at the university-industrial interface. This project can have direct impact to promote block copolymer self-assembly technology as an economically efficient extension to conventional lithography for next generation device fabrication, benefiting the semiconductor manufacturing industry and the broader electronics industry greatly. It also will substantially stimulate the study of polymer materials design for better functional performance. As part of a outreach to the broader society, a few video clips will be produced and posted onto public websites to help the students understand the science and technology of the self-assembly. This university-industry collaboration provides an excellent training ground for the participating students in a multidisciplinary environment at the interface of fundamental research and industrial manufacturing.