SBIR Phase II: Lead Zirconate Titanate (PZT) Multimorph Micro-Opto-Electro-Mechanical Systems (MOEMS) Deformable Mirror

这一小型企业创新研究(SBIR)第二阶段研究项目旨在实现微电子机械系统(MEMS)可变形反射镜性能的巨大进步。可变形反射镜是自适应光学(AO)系统中的关键有源部件，可通过湍流的空气、水和生物样品提供极大的分辨率。由于缺乏低成本、高偏转(行程)和低电压的可变形反射镜，阻碍了声光技术在生物技术、眼科和国家安全等领域的广泛应用。第一阶段成功地展示了一种新的微电子机械系统变形镜成形的驱动方法。该方法将压电驱动与MEMS变形镜技术相结合。压电致动器是一个真正的突破，因为可变形反射镜的驱动电压可以从100-200伏降低到10-20伏--减少了整整一个数量级。更小、更便宜、更安全、更可靠的低压电子产品的使用为许多应用打开了大门。第二阶段的目标是在第一阶段致动器设计的基础上，制造具有开创性的高行程、低电压、低成本、高速度和卓越光学质量的完整可变形反射镜阵列。使用可变形反射镜的自适应光学(AO)实现的高分辨率和对比度增强将极大地促进天文学、眼科、生物学和国家安全。然而，要实现全部潜力，具有高行程、低电压和低成本的微型可变形反射镜是关键。如果成功，拟议的镜面将满足将AO带入主流科学实验室和商业市场的关键要求。这将产生巨大的社会和商业影响。分辨率高得多的生物显微镜，可以为活的视网膜中的单个细胞成像的眼底镜，具有精确光束控制的激光显微手术，以及可以通过大气湍流成像的望远镜，都将推动科学的边界。随着商业化将早期眼病检测、定制视力矫正和新的医疗方法引入全国各地的医生办公室，数百万人的健康和福祉将直接得到改善。自由空间光通信和远程监控应用也将收获这项技术的好处。

This Small Business Innovation Research (SBIR) Phase II research project aims to deliver a dramatic advance in microelectromechanical system (MEMS) deformable mirror performance. Deformable mirrors are the key active component in adaptive optics (AO) systems that provide vastly improved resolution through turbulent air, water, and biological samples. The lack of low- cost, high-deflection (stroke), and low-voltage deformable mirrors has prevented the widespread deployment of AO in a range of fields including biotechnology, ophthalmology, and national security. Phase I successfully demonstrated a new actuation approach for shaping MEMS deformable mirrors. The new approach combines piezoelectric actuation with MEMS deformable mirror technology. The piezoelectric actuators are a true breakthrough as deformable mirror actuation voltage may be reduced from 100-200 volts down to 10-20 volts - a full order of magnitude reduction. The use of smaller, less expensive, safer, and more reliable low-voltage electronics opens the door for a host of applications. The goal of Phase II is to build on the Phase 1 actuator designs to manufacture complete deformable mirror arrays with groundbreaking high stroke, low voltage, low cost, high speed, coupled with superb optical quality. The high resolution and contrast enhancement enabled by adaptive optics (AO) using deformable mirrors is poised to dramatically advance astronomy, ophthalmology, biology, and national security. Yet for the full potential to be realized, miniature deformable mirrors with high stroke, low voltage, and low cost are critical. If successful the proposed mirror will address the key requirements vital for moving AO into mainstream scientific laboratories and commercial markets. This will have enormous social and commercial impact. Biological microscopes that have far higher resolution, ophthalmoscopes that can image single cells in a living retina, laser microsurgery with precise beam control, and telescopes that can image through atmospheric turbulence will push the boundaries of science. The health and well being of millions will be directly improved as commercialization moves early eye disease detection, customized vision correction, and new medical treatments into doctor offices across the nation. Free space optical communication, and long-range surveillance applications will also reap the benefits of this technology.