MRI: ACQUISITION OF DEEP REACTIVE ION ETCHING TOOL FOR INTERDISCIPLINARY RESEARCH AT THE UNIVERSITY OF SOUTH FLORIDA

这项研究的目标是通过购买深度反应离子刻蚀(DRIE)工具(配置用于深度硅、电介质和碳化硅刻蚀)和表面轮廓仪来扩大南佛罗里达大学的MEMS和微/纳米技术研究项目。其方法是：(A)利用美国联邦的众多研究和培训奖项，(B)拥有教职员工和学生广泛社会参与的跨学科研究文化。这项建议中描述的仪器将为推动微/纳米技术的研究提供动力，并将成为未来工程师和科学家的教育跳板。智力优势：所要求的仪器将是对研究中心-NNRC和大学基础设施的主要补充。他们将美化现有的各种工具，供研究人员使用。拟议的研究将以一种新的方法整合不同研究领域的发展，促进从理解到感知的不同领域的知识和理解。该研究工具将为在不同环境下制造定量诊断系统提供基础。更广泛的影响：这项研究将在新兴的跨学科领域培训学生。目前的研究活动将有本科生和代表人数不足的群体(少数群体、妇女)继续参与。预计第一年将有30多名少数族裔学生从收购中受益。研究结果将通过纳入私人投资机构开发的课程和单元、示范和外联活动来广泛传播。

The objective of this research is to augment the MEMS and micro/nanotechnology research programs at the University of South Florida through the acquisition of a Deep Reactive Ion Etching (DRIE) tool (configured for deep silicon, dielectric and SiC etching) and a surface profilometer. The approach is to leverage: (a) on numerous USF research and training awards, (b) an interdisciplinary research culture that has a broad social participation of faculty and students. The instrumentation described in this proposal will provide the impetus to drive research in micro/nanotechnology as well as serve as an educational spring-board for engineers and scientists of tomorrow. Intellectual Merit: The requested instrumentation will be a major addition to the infrastructure of the research center - NNRC and the university. They would embellish the existing assortment of tools at the researchers' disposal. Proposed research will integrate developments in different research areas in a novel approach that will advance the knowledge and understanding in diverse fields, from understanding to sensing. The research tool will provide a basis for fabrication of systems for quantitative diagnosis in diverse environments. Broader Impact: This research will train students in emerging cross-disciplinary areas. The current research activities will have continued participation of undergraduate students and underrepresented groups (minority, women). It is anticipated that over 30 minority students will benefit from the acquisition in the first year. The results of the research will be widely disseminated through inclusion in courses and modules developed by PIs, demonstrations and outreach.