SBIR Phase I: Submicron Thick Nanostructured Diamond Films

这项小型企业创新研究(SBIR)第一阶段项目建议研究将硬质超光滑纳米结构金刚石(NSD)应用于亚微米厚X射线窗口的可行性。在用微米厚的薄膜与废料间歇接触的高速分选金属废料方面，薄膜必须坚固、坚硬、附着力、抗裂、对X射线透明，并具有亚微米级的结构。此外，在光刻图案印章中的应用需要对亚微米尺寸的特征进行类似的严格磨损。这项SBIR的目标是研究一种薄的、独立的薄膜中的NSD成核、强度和X射线性质。将进行的研究包括：用于生长自支撑亚微米NSD薄膜的支撑栅的设计、选定的支撑栅优化附着力的方法、基于NSD膜的X射线窗口原型的设计以及NSD X射线窗口的测试。这项SBIR研究的预期结果包括第一批关于亚微米薄膜的X射线透明度、附着力和磨料磨损性能的NSD数据。目前，亚微米和纳米范围内坚硬、超光滑、附着力的NSD薄膜的商业价值正在探索中。在受到磨损和磨损的辐射窗口和类似光刻的工具中，可以立即发现对具有极端性能的微米和亚微米薄膜的需求。商业价值的证据在WTE公司对这项研究的支持中找到，立即应用于X射线窗口。这些涂层和薄膜的应用具有商业价值，因为它们延长了产品的寿命，减少了污染，减少了能源消耗，并促进了有效的回收利用。这些结果中的每一个都对社会产生了具体的、可量化的积极影响。

This Small Business Innovation Research (SBIR) Phase I project proposes to investigate thefeasibility of using hard ultra-smooth nanostructured diamond (NSD) for application insubmicron thick X-ray windows. In terms of sorting metal scrap at high speed with a micron-thick film intermittently in contact with scrap, the film must be strong, hard, adherent, crack resistant, transparent to X-rays and structured on a submicron scale. Furthermore, applications in lithography-pattern stamps require similar rigorous abrasive wear on submicron sized features. The objective of this SBIR is to investigate NSD nucleation, strength, and X-ray properties in a thin, free-standing film. The research to be conducted is: the design of support grids for the growth of free-standing submicron NSD film, methodology of optimizing adherence on selected support grids, design of prototype X-ray window based on NSD film, and testing of NSD X-ray windows. The anticipated results of this SBIR research include the first NSD data on X-ray transparency, adherence, and the abrasive-wear properties of submicron film.The commercial value of hard, ultra-smooth, adherent NSD films in the submicron and nano-ranges is just now being explored. The need for micron and submicron films that have extreme properties can be immediately found in radiation windows and lithography-like tools subjected to abrasion and wear. Evidence of the commercial value is found in the wTe company support of this research for immediate application in X-ray windows. The application of these coatings and films find commercial value in that they extend life of products, reduce pollution, reduce energy use and facilitate efficient recycling. Each of these outcomes has specific, quantifiable positive effects for society.