WIRELESS ORGANIC CHEMICAL SENSOR (15P07HNWLBauh)

在本研究项目中，采用化学气相沉积（CVD）技术将高灵敏度的单壁碳纳米管（SWNTs）沉积在新型廓型AlN压电MEMS/NEMS谐振器表面，形成无电池声传感器无线平台，用于检测不同气体种类。一种电路将通过寻找装载碳纳米管并以喷墨沉积的ss-DNA序列装饰的微/纳米谐振器的共振频率之间的差异来检测特定物种。挥发性有机分子和谐振器之间的序列依赖性粘附将产生高度的特异性。几秒钟后，有机分子将与DNA分离，随着环境的变化实现内置重置。射频接口电子设备将定期向外部询问器报告这些变化。本文提出的共振氮化铝（AlN）轮廓模式传感器平台由单链DNA在单壁碳纳米管上的组合功能化，将使最先进的传感器性能提高几个数量级。具体来说，新平台将实现：(i)误报率降低10倍，（ii）灵敏度提高1000倍（从十亿分之一提高到万亿分之一，这要归功于极小的谐振质量和高工作频率），（iii）小体积检测100种分析物的尺寸减少1000倍，（iv）节省200倍的功率，(v)更快的响应时间（5秒，这要归功于自刷新传感器），（vi）大幅降低制造成本（多亏了批量生产），（vii）远程操作（谐振器作为RFID标签）和（viii）几乎为零的运营费用（由于传感器的一次性性质）。

For this research project highly sensitive Single wall carbon nano-tubules (SWNTs)are deposited by chemical vapor deposition (CVD) techniques on the surface of novel contour-mode AlN piezoelectric MEMS/NEMS resonators to form batteryless acoustic sensor wireless platforms for the detection of different gas species. A circuit will detect a particular species by finding differences between the resonant frequencies of micro/nanoresonators loaded with carbon nanotubes and decorated with inkjet deposited ss-DNA sequences. A high degree of specificity will result from the sequence dependent adhesion between the volatile organic molecules and the resonators. After a few seconds, the organic molecules will detach from the DNA enabling built-in reset as the environment changes. The RF interface electronics will periodically report these changes to an external interrogator. The resonant aluminum nitride (AlN) contour-mode sensor platform functionalized by combinations of single stranded DNA on single wall carbon nanotubes that is proposed here will permit several orders of magnitude enhancement of state-of-the-art sensor performance. Specifically, the new platform will make possible: (i) 10x reduction in the false alarm rate, (ii) 1,000x improvement in sensitivity (from part per billion to part per trillion thanks to extremely small resonant mass and high frequency of operation), (iii) 1,000x reduction in size for 100 analytes detection in a small volume, (iv) 200x power savings, (v) faster response time ( 5 seconds thanks to self-refreshing sensor), (vi) dramatically reduced fabrication costs (thanks to batch production), (vii) remote operations (resonator as RFID tag) and (viii) almost zero operating expenses (thanks to the disposable nature of the sensor).