SGER: Aluminum Nitride Piezoelectric NanoElectroMechanical Resonators: Feasibility Study for 10GHz RF Applications

SGER：氮化铝压电纳米机电谐振器：10GHz 射频应用的可行性研究

• 批准号: 0822968
• 负责人: Gianluca Piazza
• 金额: $ 7.57万
• 依托单位: University of Pennsylvania
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-04-15 至 2009-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0822968&HistoricalAwards=false
• 关键词: SGER; Aluminum; Nitride; Piezoelectric; NanoElectroMechanical

Gianluca Piazza The objective of this SGER proposal is to demonstrate for the first time NanoElectroMechanical (NEM) resonators based on nanoscale (100-500nm) piezoelectric aluminum nitride films operating at a frequency range (10GHz) in which no high Q mechanical element has ever been demonstrated before. Research will focus on optimizing the sputtering deposition process for AlN by controlling power, pressure and temperature. Electronic and mechanical properties of metal films will be studied at the nanoscale in order to yield highly oriented, pin-hole free and low resistivity nanoelectrodes. COMSOL finite element software will be employed for the design of nanoscale resonators and identify the fundamental geometrical parameters available to fabricate spurious free and low impedance devices.Intellectual Merit:By promoting scientific research in nanopiezoelectrics and focusing on NEM system reliability, this work will stimulate the use of NEM piezoelectric devices for a very broad range of applications. The outcome of this research will provide significant performance improvements in RF wireless communications, chemical sensing, imaging, force sensing, and computing. The research will tackle a fundamental problem in nanotechnology related to the need of transducers capable of providing a direct and on-chip link between the nano and the macro world. Also, the introduction of nanoscale piezoelectric resonators will have a direct impact in several areas such as microwave communications, computing and sensing. The high frequency of operation will increase the sensitivity of any resonant sensor by more than 3 orders of magnitude. At the same time lower actuation voltages (5-10x) and power consumption (10-100x) will be achieved as smaller electric fields are required to excite the piezoelectric effect at the nanoscale.Broader Impact:The PI plans to include the results of this research in his lectures of ESE/MEAM 529: ?RF MEMS/NEMS?. This course is taught in three different engineering departments. The PI will engage with high school students, undergraduates, high school teachers and the general public during the NanoDay at Penn and by offering lectures on nanotechnologies at a local high school (Mariana Bracetti Academy). The PI also plans to involve 1 undergraduate student in this project during the summer months. The mechanisms for this involvement will leverage the UPenn?s SUNFEST program.

GianLuca Piazza这项SGER提案的目标是首次展示基于纳米级(100-500 nm)压电氮化铝薄膜的纳米机电(NEM)谐振器，该谐振器工作在10 GHz的频率范围内，这是以前从未展示过的高Q值机械元件。研究将集中在通过控制功率、压力和温度来优化AlN的溅射沉积工艺。为了获得高取向、无针孔、低电阻率的纳米电极，人们将在纳米尺度上研究金属薄膜的电学和力学性质。COMSOL有限元软件将用于纳米级谐振器的设计，并确定可用于制造无杂散和低阻抗器件的基本几何参数。智力价值：通过促进纳米电学的科学研究和关注NEM系统的可靠性，这项工作将促进NEM压电器件在非常广泛的应用中的使用。这项研究的结果将在射频无线通信、化学传感、成像、力传感和计算方面提供显著的性能改进。这项研究将解决纳米技术中的一个基本问题，即需要能够在纳米和宏观世界之间提供直接和芯片上联系的传感器。此外，纳米级压电谐振器的引入将在微波通信、计算和传感等几个领域产生直接影响。高频工作将使任何谐振传感器的灵敏度提高3个数量级以上。同时，由于需要更小的电场来激发纳米级的压电效应，因此将实现更低的驱动电压(5-10倍)和功耗(10-100倍)。广泛影响：PI计划在他的ESE/MEAM 529讲座中包括这项研究的结果：？RF MEMS/NEMS？这门课在三个不同的工程系教授。在宾夕法尼亚大学纳米日期间，PI将与高中生、本科生、高中教师和普通公众接触，并在当地一所高中(Mariana Bracetti Academy)提供关于纳米技术的讲座。PI还计划在夏季的几个月里让1名本科生参与这个项目。这种参与的机制将利用宾夕法尼亚大学S太阳节计划。