Monolithically Integrated Aluminum Nitride Micromechanical Radio Front-End

目的研制首个由氮化铝轮廓模谐振器和开关集成而成的单芯片射频平台。该方法基于对系统集成级压电材料的基本问题的理解，重点关注所提出的微器件的制造良率、可靠性和可重复性。谐振器的工作频率将提高到6 GHz，最近开发的微开关将集成在相同的工艺中，并针对低压驱动进行优化。压电微机械器件的大规模集成将对未来无线电前端产生变革性影响。这种集成将使利用跳频和信道选择的新型低功耗无线电架构成为可能。在未报告的操作频率下，将探讨与器件设计，阻抗特性和Q限制相关的基本挑战。压电的基本问题，有关材料取向，机电耦合，残余应力和传感器建模将被检查和他们的理解允许在使用这些薄膜的重大飞跃。更广泛的影响研究活动将促进无线通信和传感领域的显著进步，使实现多标准和可重构设备成为可能。在这个项目下进行的发现和技术开发将通过包括新创建的课程，REU项目的发现来传播，并为费城学区的K-12学生和少数族裔提供参观和实践培训课程。

ObjectiveThe objective of this research is to develop the first single-chip radio frequency platform formed by the integration of Aluminum Nitride contour-mode resonators and switches. The approach is based on understanding the fundamental issues for piezoelectrics at the system integration level by focusing on fabrication yield, reliability, and reproducibility of the proposed microdevices. The frequency of operation of the resonators will be increased up to 6 GHz and recently developed microswitches will be integrated in the same process and optimized for low voltage actuation.Intellectual MeritThe large scale integration of piezoelectric micromechanical devices will have a transformational impact on future radio front-ends. New low power radio architectures that take advantage of frequency hopping and channel selection will be enabled by this integration. Fundamental challenges related to device design, impedance characterization and Q limits will be explored at unreported frequencies of operation. The fundamental issues of piezoelectrics concerning material orientation, electromechanical coupling, residual stresses and transducer modeling will be examined and their understanding permit a significant leap forward in the use of these films. Broader ImpactThe research activities will promote notable advancements in the area of wireless communications and sensing by making possible the realization of multi-standard and reconfigurable devices. The discoveries and technology development performed under this project will be disseminated by including the findings in a newly created course, REU programs, and offering tours and hands-on training sessions to K-12 students and underrepresented minority in the Philadelphia school district.