Monolithically Integrated Aluminum Nitride Micromechanical Radio Front-End

本研究的目标是开发第一个由氮化铝轮廓模谐振器和开关集成形成的单芯片射频平台。 该方法是基于理解压电在系统集成水平的基本问题，专注于制造产量，可靠性和再现性的建议的微器件。谐振器的工作频率将增加到6 GHz，最近开发的微型开关将集成在同一过程中，并优化为低电压actuation.Intellectual MeritThe大规模集成的压电微机械器件将有一个转型的影响，未来的无线电前端。新的低功耗无线电架构，利用跳频和信道选择将使这种集成。与器件设计，阻抗特性和Q限制有关的基本挑战将在未报告的工作频率下进行探索。压电材料的取向，机电耦合，残余应力和传感器建模的基本问题将被检查和他们的理解允许在使用这些薄膜的一个重大飞跃。更广泛的影响研究活动将促进无线通信和传感领域的显着进步，使实现多标准和可重构设备成为可能。 在本项目下进行的发现和技术开发将通过将发现纳入新创建的课程、REU计划以及向K-12学生和费城学区代表性不足的少数民族提供图尔斯参观和实践培训课程来传播。

ObjectiveThe objective of this research is to develop the first single-chip radio frequency platform formed by the integration of Aluminum Nitride contour-mode resonators and switches. The approach is based on understanding the fundamental issues for piezoelectrics at the system integration level by focusing on fabrication yield, reliability, and reproducibility of the proposed microdevices. The frequency of operation of the resonators will be increased up to 6 GHz and recently developed microswitches will be integrated in the same process and optimized for low voltage actuation.Intellectual MeritThe large scale integration of piezoelectric micromechanical devices will have a transformational impact on future radio front-ends. New low power radio architectures that take advantage of frequency hopping and channel selection will be enabled by this integration. Fundamental challenges related to device design, impedance characterization and Q limits will be explored at unreported frequencies of operation. The fundamental issues of piezoelectrics concerning material orientation, electromechanical coupling, residual stresses and transducer modeling will be examined and their understanding permit a significant leap forward in the use of these films. Broader ImpactThe research activities will promote notable advancements in the area of wireless communications and sensing by making possible the realization of multi-standard and reconfigurable devices. The discoveries and technology development performed under this project will be disseminated by including the findings in a newly created course, REU programs, and offering tours and hands-on training sessions to K-12 students and underrepresented minority in the Philadelphia school district.