ACOUSTO-OPTO-MECHANICAL SYSTEMS in PIEZOELECTRIC ALUMINUM NITRIDE NANOFILMS FOR RADIO FREQUENCY PHOTONICS
用于射频光子学的压电氮化铝纳米薄膜中的声光机械系统
基本信息
- 批准号:1201659
- 负责人:
- 金额:$ 33.13万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Continuing Grant
- 财政年份:2012
- 资助国家:美国
- 起止时间:2012-07-01 至 2017-06-30
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
The objective of this research is to use on-chip acoustics and photonics to produce miniaturized components that offer a very competitive approach for the synthesis of low power radio receivers. The approach consists in developing devices made out of piezoelectric aluminum nitride (AlN) thin films, in which acousto-optic (modulation of optical signals via elastic waves) and opto-mechanical (modulation of mechanical vibrations via radiation pressure) effects are exploited in confined nanoscale resonant structures. The proposed radio frequency (RF)-photonic receiver relies on an AlN piezoelectric micromechanical filter to select the incoming RF signal (electromechanical effect) and modulate the photonic signal (acousto-optic effect). It also uses the intrinsic non-linearity of the self-sustained opto-mechanical oscillator (opto-mechanical effect) to down convert the signal to baseband. The intellectual merit of this proposal consists in addressing the engineering challenges that limit the realization of compact RF-photonics receivers based on exploiting electromechanical, acousto-optic and opto-mechanical effects in AlN films. Scientifically, elasto-optic effects in thin AlN films and noise mechanisms in nanoscale opto-mechanical devices will be understood. Beyond directly impacting wireless communications, the proposed acousto-opto-mechanical platform will benefit the broader field of photonics by enabling visible and deep ultraviolet components that could be employed for medical applications. Simultaneously, the high mechanical displacement sensitivity attained via acousto-optic modulators can be transferred to inertial and pressure sensors to enhance their resolution. More broadly, the knowledge generated by these research activities will set the pathway for the synthesis of low power distributed communication links and will enable new generations of sensor networks.
本研究的目的是使用片上声学和光子学来生产小型化元件,为低功率无线电接收器的合成提供非常有竞争力的方法。该方法包括开发由压电氮化铝(AlN)薄膜制成的设备,其中声光(通过弹性波调制光信号)和光机械(通过辐射压力调制机械振动)效应在受限的纳米级谐振结构中被利用。所提出的射频(RF)-光子接收器依赖于AlN压电微机械滤波器来选择输入的RF信号(机电效应)和调制光子信号(声光效应)。它还利用自持光机械振荡器的固有非线性(光机械效应)将信号下变频到基带。该建议的智力价值在于解决工程上的挑战,限制实现紧凑的RF光子接收器的基础上利用AlN薄膜中的机电,声光和光机械效应。 科学,弹性光学效应在薄氮化铝薄膜和噪声机制在纳米光机械设备将被理解。 除了直接影响无线通信之外,拟议的声光机械平台将通过实现可用于医疗应用的可见光和深紫外组件,使更广泛的光子学领域受益。同时,通过声光调制器获得的高机械位移灵敏度可以转移到惯性和压力传感器,以提高其分辨率。更广泛地说,这些研究活动所产生的知识将为低功耗分布式通信链路的合成奠定基础,并将使新一代传感器网络成为可能。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
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Gianluca Piazza其他文献
Measurement of Intrinsic Mechanical Loss in Aluminum Films from 3 to 25 GHz by HBAR Spectroscopy
通过 HBAR 光谱测量 3 至 25 GHz 铝膜的固有机械损耗
- DOI:
- 发表时间:
2023 - 期刊:
- 影响因子:0
- 作者:
Zachary Schaffer;Ahmed Hassanien;Mohammad Ayaz Masud;Gianluca Piazza - 通讯作者:
Gianluca Piazza
Alumimun nitride piezoelectric NEMS resonators and switches
氮化铝压电 NEMS 谐振器和开关
- DOI:
10.1117/12.849989 - 发表时间:
2010 - 期刊:
- 影响因子:4.9
- 作者:
Gianluca Piazza - 通讯作者:
Gianluca Piazza
Experimental Investigation of Thermally Induced Nonlinearities in Aluminum Nitride Contour-Mode MEMS Resonators
氮化铝轮廓模式 MEMS 谐振器热致非线性的实验研究
- DOI:
10.1109/led.2012.2188491 - 发表时间:
2012 - 期刊:
- 影响因子:4.9
- 作者:
Augusto Tazzoli;Matteo Rinaldi;Gianluca Piazza - 通讯作者:
Gianluca Piazza
Up-Scaling Microacoustics: 20 to 35 GHz ALN Resonators with f • Q Products Exceeding 14 THz
微声学升级:20 至 35 GHz ALN 谐振器,f • Q 产品超过 14 THz
- DOI:
- 发表时间:
2024 - 期刊:
- 影响因子:0
- 作者:
Gabriel Giribaldi;Luca Colombo;Matteo Castellani;Mohammed Ayaz Masud;Gianluca Piazza;Matteo Rinaldi - 通讯作者:
Matteo Rinaldi
Gianluca Piazza的其他文献
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{{ truncateString('Gianluca Piazza', 18)}}的其他基金
Breaking the Barrier for Acoustic Resonators: High Performance Filters at Millimeter Waves
打破声学谐振器的障碍:毫米波高性能滤波器
- 批准号:
2133388 - 财政年份:2021
- 资助金额:
$ 33.13万 - 项目类别:
Standard Grant
pNUTs: Piezoelectric Nanoscale Ultrasonic Transducers for Dust-Like Airborne Communication Links
pNUT:用于类灰尘机载通信链路的压电纳米级超声波换能器
- 批准号:
2104142 - 财政年份:2021
- 资助金额:
$ 33.13万 - 项目类别:
Standard Grant
I-Corps: Acoustic Filters for Next Generation Wireless Handsets
I-Corps:用于下一代无线手机的声学滤波器
- 批准号:
2026275 - 财政年份:2020
- 资助金额:
$ 33.13万 - 项目类别:
Standard Grant
PFI-TT: Acoustic Filters for 5G Handsets
PFI-TT:5G 手机的声学滤波器
- 批准号:
1941183 - 财政年份:2020
- 资助金额:
$ 33.13万 - 项目类别:
Standard Grant
ACOUSTO-OPTICAL PHASED ARRAYS (A-OPA)
声光相控阵 (A-OPA)
- 批准号:
1905834 - 财政年份:2019
- 资助金额:
$ 33.13万 - 项目类别:
Standard Grant
Monolithically Integrated Aluminum Nitride Micromechanical Radio Front-End
单片集成氮化铝微机械无线电前端
- 批准号:
1237949 - 财政年份:2012
- 资助金额:
$ 33.13万 - 项目类别:
Standard Grant
WIRELESS ORGANIC CHEMICAL SENSOR (15P07HNWLBauh)
无线有机化学传感器 (15P07HNWLBauh)
- 批准号:
1237960 - 财政年份:2012
- 资助金额:
$ 33.13万 - 项目类别:
Standard Grant
SGER: Aluminum Nitride Piezoelectric NanoElectroMechanical Resonators: Feasibility Study for 10GHz RF Applications
SGER:氮化铝压电纳米机电谐振器:10GHz 射频应用的可行性研究
- 批准号:
0822968 - 财政年份:2008
- 资助金额:
$ 33.13万 - 项目类别:
Standard Grant
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