SBIR Phase II: Particle Metrology and Diagnostics using Microchannel Resonators

这一小型企业创新研究(SBIR)第二阶段计划开发了一种能够使用其重量作为测量参数来测量微米级颗粒的仪器。S仪器的核心是一种新型的微细加工传感器，其中包含一个振动微通道。当目标颗粒通过通道时，它们悬浮在液体中，导致通道振动频率以低于皮克的灵敏度变化。这项研究的更广泛影响将是提供一种粒度分析方法，除了尺寸之外，还能提供质量。许多行业的制造过程都可以从这种类型的仪器中受益，以改进其工艺，从而降低生产成本，并在质量保证计划中使用时提高产品质量。

This Small Business Innovation Research (SBIR) Phase II program develops an instrument capable of measuring micron-scale particles using their weight as the measured parameter. At the instrument''s core is a novel microfabricated sensor containing a vibrating microchannel. The target particles are suspended in fluid as they pass through the channel, causing channel vibration frequency to change with a sensitivity of less than a picogram. The broader impact of this research will to provide a method for particle size analysis that in addition to size gives mass. Manufacturing processes in many industries could benefit from this type of instrument to improve their processes and thereby lower production costs as well as improving product quality when used in a quality assurance program.