STTR Phase II: Diamond Nanoprobes for Atomic Force Microscopy - Imaging, Metrology, Material Property Measurement, Process Control, and Manipulation with Ultrahigh Performanc

这个STTR二期项目将开发商业上可行的原子力显微镜（AFM）探针，由超晶金刚石制成。该项目将完善第一阶段开发的工艺，并将接触式和非接触式全金刚石探头推向市场。使用导电金刚石的探针，化学和电子可调谐，并具有极好的摩擦学性能也将得到发展。这项工作将促进AFM的新工业应用，包括高通量成像，计量和大量材料的表征，微/纳米电子学过程控制的局部电气表征，MEMS/NEMS器件的纳米力学表征，以及微/纳米光刻行业的超精密硬掩模校正。

This STTR Phase II project will develop commercially viable atomic force microscope (AFM) probes fabricated from ultrananocrystalline diamond. The project will refine the processes developed in Phase I and bring contact and non-contact all-diamond probes to market. Probes using conducting diamond that are chemically and electronically tunable and have superb tribological properties will also be developed. This work will facilitate new industrial applications for AFM, including high-throughput imaging, metrology, and characterization of large quantities of materials, local electrical characterization for process control in micro/nanoelectronics, nanomechanical characterization of MEMS/NEMS devices, and ultraprecise hard mask correction for the micro/nanolithography industry.