Ultra-sensitive Magnetic Sensors Integrating the Giant Magnetoelectric Effect with MEMs and Advanced Microelectronics

研究目标和方法：本研究的目标是开发超灵敏和紧凑的磁力计，其特点是磁电传感器直接集成在芯片上，具有先进的微电子技术，用于无创医学成像。该方法是基于使用集成磁电复合材料的皮特斯拉磁灵敏度的潜力。本研究旨在通过改善元件之间的机械阻抗匹配，探索全新的磁电耦合，以及将基于mems的结构作为mosfet的谐振移动门以进一步放大，进一步提高基于直接应力介导的磁电耦合的灵敏度。智力优势：在器件和电路层面上，将微电子与传感器无缝融合的异构集成策略的演示，为半导体和传感器行业的转型转变提供了巨大的希望。此外，所提出的研究将为了解复合材料成分之间的磁能传递效率提供基础。该研究还将为设计和制造共振移动栅极晶体管提供见解，从而显著提高传感器的性能。更广泛的影响：芯片级磁传感器的成功开发将彻底改变生物磁场检测和成像领域。此外，低成本诊断工具的可用性将极大地促进疾病的早期检测。在教育和推广方面，本研究将培养跨学科的教育计划，激励学生了解基础材料科学和器件物理学，并将其纳入固态器件制造，以解决生命科学和生物医学成像领域的复杂检测和诊断问题。

Research Objectives and Approaches: The objective of this research is to develop ultra-sensitive and compact magnetometers, featuring the direct on-chip integration of magnetoelectric sensors, with advanced microelectronics, for non-invasive medical imaging. The approach is based on the potential of picoTesla magnetic sensitivity using integrated magnetoelectric composites. This research aims to further improve the sensitivity beyond those based on the direct stress mediated magnetoelectric coupling by improving the mechanical impedance match between the constituents, by exploring totally new magnetoelectric coupling, and by incorporating MEMs-based structures as resonant moving gates of MOSFETs for further amplification. Intellectual Merit: The demonstration of a heterogeneous integration strategy at the devices and circuits level that seamlessly merges microelectronics with sensors holds great promise of enabling transformational shifts in the semiconductor and sensor industry. Further, the proposed research will provide fundamental understanding on the magnetic energy transfer efficiency between the constituents of the composites. The research will also provide insight into design and fabrication of resonant moving gate transistors that markedly improve the sensor performance.Broader Impact: The successful development of chip scale magnetic sensors will revolutionize the field of biomagnetic field detection and imaging. Moreover, the availability of low cost diagnostic tools will greatly facilitate early disease detection. On the education and outreach font, this research will foster an interdisciplinary educational program that will inspire students to understand fundamental materials science and device physics and incorporate them into solid-state device fabrication to address complex detection and diagnosis problems in the life science and biomedical imaging area.