MRI: Acquisition of a multi-pocket e-beam evaporator for nano/micro facility at CCNY

项目摘要：本项目申请资金用于在纽约城市学院（CCNY）购置一台多袖珍电子束蒸发器。该系统将被配置为在共享设施环境中提供高水平的能力和最大的灵活性。多口袋电子束蒸发器将提供在高真空中沉积六种不同金属/电介质的能力，以实现它们之间的光滑和精确的界面。获得电子束蒸发器和CCNY的纳米/微设备将通过将实践经验纳入课堂材料，提高研究培训和教育的质量和范围，并通过为本科生和研究生提供新的研究机会，促进研究和教育的整合。使用拟议设备进行的研究是跨学科的，涉及各个部门的合作努力。这将是一个很好的机会，让我们的学生获得跨学科的知识和研究经验，通过参与这些研究活动。CCNY致力于为其主要的西班牙裔美国人，非洲裔美国人和女性学生提供高质量的教育。获得电子束蒸发器系统带来的研究机会将促进更多未被充分代表的少数群体在CCNY攻读科学和工程的高级学位，并为他们毕业后在纳米/微技术领域的工业和研究生学习做好更好的准备。拟议的设备将满足纽约城市学院对纳米/微技术教育和研究的关键和日益增长的需求。

Program AbstractThis proposal requests funding to acquire a multi-pocket electron-beam evaporator at the City College of New York (CCNY). The system will be configured to provide a high level of capability and maximum flexibility for use in a shared facility environment. A multi-pocket electron beam evaporator will provide a capability of depositing six different metals/dielectrics in a high vacuum for smooth and precise interface between them. The acquisition of an e-beam evaporator with the nano/micro facility at CCNY will enhance the quality and scope of the research training and education by incorporating hands-on experience in the class materials and also foster the integration of research and education by offering new research opportunities for both undergraduate and graduate students. The research conducted using the proposed equipment is interdisciplinary and involves the collaborative efforts from various departments. This will be a great opportunity for our students to obtain interdisciplinary knowledge and research experience through participating in these research activities. CCNY is committed to providing a high-quality education to its predominant Hispanic American, African-American, and female students. Research opportunities resulting from the acquisition of the e-beam evaporator system will promote more underrepresented minority groups to pursue in advanced degrees in science and engineering at CCNY and better prepare them for the industry and graduate studies in nano/micro technology areas upon their graduation. The proposed equipment will fulfill a critical and growing need for both the education and research on nano/micro technology at the City College of New York.